Subject: Problem wbsilicide SNF 2009-09-17 16:53:32: Do not use Spin rinse dryer!
From: mtang@snf.stanford.edu
Date: Thu, 17 Sep 2009 16:53:32 -0700

The spin rinse dryer needs repairs and decontamination -- do not use.  As backup, please
use wbnitride for clean-grade wafers.