Subject: Comment wbsilicide SNF 2010-06-24 06:55:41: resist flakes in left hot bath
From: dkozak@snf.stanford.edu
Date: Thu, 24 Jun 2010 06:55:41 -0700

Have used left hot bath (pirahna) to strip resist from 10 wafers, coated in 1.6um of
SPR 3612.   Used standard 20 min at 120 degrees C.
Afterwards, the liquid in the pot is brown, and large flakes of resist flow around the
pot.  Did not clear after 5 hours.
Tried to clean the pot -- by aspirating the bath.  Temperature is 94 degrees, but the
pot will not drain -- gives alarm.