Subject: Comment wbsilicide SNF 2011-10-25 15:43:50: New SC1 since July 22
From: uli@snf.stanford.edu
Date: Tue, 25 Oct 2011 15:43:50 -0700

Change in standard pre-furnace clean procedures:
Instead of the 4:1 sulfuric-peroxide/HCl-SC2/HF dip sequence that has been standard
at SNF for many years, we are going to use a standard RCA: SC1/SC2/HF dip.
SC1 consists of 5:1:1 H2O/H2O2/NH4OH (Ammonium Hydroxide).
The SC1 bath must be changed every four hours and the addition of H2O2 is allowed, much
the same as the SC2 bath, 5:1:1 H2O:H2O2:HCl.  The bath temperature is 50C and the time
remains 10 minutes.