Messages 0xx


01: Shutdown drytek1: shutdown test #2 ((none))
02: Shutdown drytek1: Test #2 Cleared ((none))
03: Shutdown drytek1: ((none))
04: Shutdown drytek1: cleared - shutdown because of blower ((none))
05: Problem drytek1: (sigari.snf.stanford.edu)
06: Problem Clear drytek1: light bulb is bad, push botton switch is ok. changed bulb... (cbaxter.snf.stanford.edu)
07: Problem drytek1: bird meter not working (lindaw.snf.stanford.edu)
08: Problem drytek1: no plasma (ericp.snf.stanford.edu)
09: Problem Clear drytek1: slug was inserted all the way in.. (cbaxter.snf.stanford.edu)
10: Problem Clear drytek1: ran recipe 3 and plasma was ok @100watts and 0 reflective. (cbaxter.snf.stanford.edu)
11: Problem drytek1: (sulchek.snf.stanford.edu)
12: Problem Clear drytek1: Turned pumps on. jim (mcvittie.snf.stanford.edu)
13: Shutdown drytek1: need to clean chamber electrode (cbaxter.snf.stanford.edu)
14: Shutdown Clear drytek1: cha. clean completed and condition.. (cbaxter.snf.stanford.edu)
15: Shutdown drytek1: Vacum Problem (flannery.snf.stanford.edu)
16: Shutdown Clear drytek1: Turned on blower pump. Jim (mcvittie.snf.stanford.edu)
17: Problem drytek1: F115 tank too low (lindaw.snf.stanford.edu)
18: Problem Clear drytek1: F115 replenshed. (latta.snf.stanford.edu)
19: Shutdown drytek1: pump needed oil and filter changedDate: Nov 15, 2000 7:04:32 PM (cbaxter.snf.stanford.edu)
20: Shutdown drytek1: pump needed oil and filter changedDate: Nov 15, 2000 9:10:27 PM (cbaxter.snf.stanford.edu)
21: Problem drytek1 2001-01-09 09:56:58: Test problem ... please ignore (shott.snf.stanford.edu)
22: Re: Problem drytek1 2001-01-09 09:56:58: Test problem ... please ignore (shott.snf.stanford.edu)
23: Problem drytek1 2001-01-30 19:54:42: Will not start gas flow after starting process (sminne.snf.stanford.edu)
24: Re: Problem drytek1 2001-01-30 19:54:42: Will not start gas flow after starting process (cbaxter.snf.stanford.edu)
25: Problem drytek1 2001-02-28 11:30:19: can't tune (franklin.snf.stanford.edu)
26: Problem drytek1 2001-02-28 13:10:31: coil won't turn (lindaw.snf.stanford.edu)
27: Re: Problem drytek1 2001-02-28 13:10:31: coil won't turn (cbaxter.snf.stanford.edu)
28: Re: Problem drytek1 2001-02-28 11:30:19: can't tune (cbaxter.snf.stanford.edu)
29: Shutdown drytek1 2001-03-03 16:51:08: Tuning problem (mcp.snf.stanford.edu)
30: Re: Shutdown drytek1 2001-03-03 16:51:08: Tuning problem (cbaxter.snf.stanford.edu)
31: Problem drytek1 2001-03-17 20:03:08: gas flow could not be turned on (yangxu.snf.stanford.edu)
32: Re: Problem drytek1 2001-03-17 20:03:08: gas flow could not be turned on (cbaxter.snf.stanford.edu)
33: Problem drytek1 2001-03-21 15:51:50: Start cycle does not work (ganesan.snf.stanford.edu)
34: Re: Problem drytek1 2001-03-21 15:51:50: Start cycle does not work (cbaxter.snf.stanford.edu)
35: Shutdown drytek1 2001-04-17 10:20:24: Pumps down, but no gas flow on any process (lindaw.snf.stanford.edu)
36: Re: Shutdown drytek1 2001-04-17 10:20:24: Pumps down, but no gas flow on any process (booth.snf.stanford.edu)
37: Problem drytek1 2001-04-21 16:07:47: process 2 button lamp burnt out (lindaw.snf.stanford.edu)
38: Re: Problem drytek1 2001-04-21 16:07:47: process 2 button lamp burnt out (booth.snf.stanford.edu)
39: Shutdown drytek1 2001-04-24 07:46:08: vacuum system not reaching base pressure (booth.snf.stanford.edu)
40: Re: Shutdown drytek1 2001-04-24 07:46:08: vacuum system not reaching base pressure (cbaxter.snf.stanford.edu)
41: Shutdown drytek1 2001-05-14 22:01:15: inductor arcing failure (storment.snf.stanford.edu)
42: Problem drytek1 2001-05-14 23:05:21: adjustable inductor is arcing will need to change.. (cbaxter.snf.stanford.edu)
43: Re: Shutdown drytek1 2001-05-14 22:01:15: inductor arcing failure (cbaxter.snf.stanford.edu)
44: Re: Problem drytek1 2001-05-14 23:05:21: adjustable inductor is arcing will need to change.. (cbaxter.snf.stanford.edu)
45: Problem drytek1 2001-06-11 09:59:58: missing locating pin front right (lindaw.snf.stanford.edu)
46: Re: Problem drytek1 2001-06-11 09:59:58: missing locating pin front right (cbaxter.snf.stanford.edu)
47: Problem drytek1 2001-06-29 10:08:58: load complete light out (franklin.snf.stanford.edu)
48: Re: Problem drytek1 2001-06-29 10:08:58: load complete light out (cbaxter.snf.stanford.edu)
49: Shutdown drytek1 2001-07-18 10:31:49: chamber will not pump down to base press. (booth.snf.stanford.edu)
50: Shutdown drytek1 2001-07-18 11:51:17: Blower needs oil (as per Len) (latta.snf.stanford.edu)
51: Re: Shutdown drytek1 2001-07-18 11:51:17: Blower needs oil (as per Len) (cbaxter.snf.stanford.edu)
52: Re: Shutdown drytek1 2001-07-18 10:31:49: chamber will not pump down to base press. (cbaxter.snf.stanford.edu)
53: Re: Shutdown drytek1 2001-07-18 10:31:49: chamber will not pump down to base press. (cbaxter.snf.stanford.edu)
54: Shutdown drytek1 2001-08-25 07:44:16: facility (rcrane.snf.stanford.edu)
55: Shutdown drytek1 2001-08-25 07:44:46: facility (rcrane.snf.stanford.edu)
56: Re: Shutdown drytek1 2001-08-25 07:44:46: facility (rcrane.snf.stanford.edu)
57: Re: Shutdown drytek1 2001-08-25 07:44:16: facility (rcrane.snf.stanford.edu)
58: Problem drytek1 2001-08-26 20:33:22: Teflon pegs (dton.snf.stanford.edu)
59: Re: Problem drytek1 2001-08-26 20:33:22: Teflon pegs (cbaxter.snf.stanford.edu)
60: Problem drytek1 2001-08-29 22:34:48: etch rate unusually low; spoke to others who observed same problem (sjlee.snf.stanford.edu)
61: Problem drytek1 2001-08-31 18:59:09: Slow etch rate - reconfirmed (dton.snf.stanford.edu)
62: Re: Problem drytek1 2001-08-31 18:59:09: Slow etch rate - reconfirmed (cbaxter.snf.stanford.edu)
63: Re: Problem drytek1 2001-08-29 22:34:48: etch rate unusually low; spoke to others who observed same problem (cbaxter.snf.stanford.edu)
64: Shutdown drytek1 2001-09-04 13:43:05: checking for water leaks in chamber. (booth.snf.stanford.edu)
65: Shutdown drytek1 2001-09-04 22:13:27: (cbaxter.snf.stanford.edu)
66: Re: Shutdown drytek1 2001-09-04 22:13:27: (cbaxter.snf.stanford.edu)
67: Re: Shutdown drytek1 2001-09-04 13:43:05: checking for water leaks in chamber. (cbaxter.snf.stanford.edu)
68: Problem drytek1 2001-09-10 22:17:00: (crozier.snf.stanford.edu)
69: Re: Problem drytek1 2001-09-10 22:17:00: (cbaxter.snf.stanford.edu)
70: Shutdown drytek1 2001-09-13 13:41:52: system won't pumpdown (booth.snf.stanford.edu)
71: Re: Shutdown drytek1 2001-09-13 13:41:52: system won't pumpdown (booth.snf.stanford.edu)
72: Shutdown drytek1 2001-09-17 07:14:59: short pump maintenance. (booth.snf.stanford.edu)
73: Re: Shutdown drytek1 2001-09-17 07:14:59: short pump maintenance. (booth.snf.stanford.edu)
74: Shutdown drytek1 2001-09-18 06:54:16: short pump adjustment. (booth.snf.stanford.edu)
75: Re: Shutdown drytek1 2001-09-18 06:54:16: short pump adjustment. (booth.snf.stanford.edu)
76: Problem drytek1 2001-10-18 16:15:30: No Plasma (florando.snf.stanford.edu)
77: Re: Problem drytek1 2001-10-18 16:15:30: No Plasma (cbaxter.snf.stanford.edu)
78: Comment drytek1 2001-10-23 11:25:01: No Plasma (florando.snf.stanford.edu)
79: Shutdown drytek1 2001-10-23 11:29:26: NO plasma (florando.snf.stanford.edu)
80: Re: Shutdown drytek1 2001-10-23 11:29:26: Fixed by Increase The RF Level (hphan.snf.stanford.edu)
81: Problem drytek1 2001-11-12 10:32:29: Mechanical Pump Light is Off, Cycle Doesn't Work (hphan.snf.stanford.edu)
82: Re: Problem drytek1 2001-11-12 10:32:29: Mechanical Pump Light is Off, Cycle Doesn't Work (booth.snf.stanford.edu)
83: Shutdown drytek1 2001-12-15 00:00:03: no plasma (hector.snf.stanford.edu)
84: Re: Shutdown drytek1 2001-12-15 00:00:03: Re-tuned Matching Network (mcvittie.snf.stanford.edu)
85: Problem drytek1 2001-12-17 11:22:12: Can't adjust the coil. -> High reflectance power (pzwahlen.snf.stanford.edu)
86: Re: Problem drytek1 2001-12-17 11:22:12: Can't adjust the coil. -> High reflectance power (booth.snf.stanford.edu)
87: Problem drytek1 2001-12-17 19:24:48: plasma stops (rgrow.snf.stanford.edu)
88: Re: Problem drytek1 2001-12-17 19:24:48: plasma stops (cbaxter.snf.stanford.edu)
89: Problem drytek1 2001-12-18 20:35:49: intermitent plasma (hector.snf.stanford.edu)
90: Re: Problem drytek1 2001-12-18 20:35:49: intermitent plasma (booth.snf.stanford.edu)
91: Shutdown drytek1 2002-01-07 16:39:31: do for oil change (cbaxter.snf.stanford.edu)
92: Re: Shutdown drytek1 2002-01-07 16:39:31: do for oil change (cbaxter.snf.stanford.edu)
93: Shutdown drytek1 2002-02-14 16:13:00: need oil change (cbaxter.snf.stanford.edu)
94: Re: Shutdown drytek1 2002-02-14 16:13:00: need oil change (cbaxter.snf.stanford.edu)
95: Problem drytek1 2002-03-16 14:29:41: drytek1 won't pump down (jackson.snf.stanford.edu)
96: Shutdown drytek1 2002-03-18 11:51:53: Throtle valve controller out of calibration (hphan.snf.stanford.edu)
97: Re: Shutdown drytek1 2002-03-18 11:51:53: Throtle valve controller out of calibration (cbaxter.snf.stanford.edu)
98: Re: Problem drytek1 2002-03-16 14:29:41: drytek1 won't pump down (cbaxter.snf.stanford.edu)
99: Shutdown drytek1 2002-03-19 18:36:29: shutdown for oil and filter change (cbaxter.snf.stanford.edu)