Subject: Morning Litho status 11/5
From: Gary J Sosa <gsosa@stanford.edu>
Date: Mon, 5 Nov 2012 07:46:17 -0800 (PST)
Mon, 5 Nov 2012 07:46:17 -0800 (PST)
Good morning All... 

Here is the morning Litho status report. 

Please check back in Coral for the latest tool updates and current equipment status


Thanks.. The Litho Team 


	
Photolithography Quick Snapshot 	
	
Monday, November 05, 2012 
	
New Issues 	
	
	
	

	
Laurel R- Problem: User "kcbalram" reports a broken wafer in process bowl. 
	
SVGCoat- Problem: User "popomoo" reports 3612 resist not dispensing 
	

	

	

	
Old Issues- Ongoing 	
	
	

	
ASML Stepper- Purge hood removed again due to contamination issue and damage to 
	
wafer table optics. The following process restrictions are in effect: 1- No thick resist
processing 
	
(3.0 microns and above) until further notice. Possible re-installation this week but
depends 
	
on ASML's available resources. 
	
YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck

	
on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating
options. 
	
KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still
need 
	
to check 3", 5" 6" and 8" wafer sized and re-teach as needed. 
	

	
KS Coat- Problem: User "lindaohara" reports a coolant water flow problem. Investigated

	
and found the water pump to be bad. Motor is OK. Water pump replaced on 11/2. Good water

	
flow. Cannot reach setpoint of 21 degrees C.. Suspect bad chiller. Will investigate
further. 
	

	
	
	
	
	

	
Resolved Issues 	
	
	

	

	

	

	
	
	
	
	

	

	

	

	

	

	
Photolithography Area Status 	
	
Monday, November 05, 2012 
	
General Information / Lab Activities 	
	
	

	
Mahnaz - Vacation(10/29 - 11/13) 
	

	
EVG Bonder- Changing pressure plate from Quartz to Steel today(11/5) 
	

	

	

	
Exposure Tools 	
Status 	
Comments 	
Priority 
	
ASML Stepper 	
PROBLEM 	
No thick resist processing 	
5 
	
EVAlign 	
PROBLEM 	
Intermittent joystick problem 	

	
EVAlign2 	
UP 	
	

	
EVG-Imprint 	
PROBLEM 	
Tool idle til needed 	

	
Karl Suss 1 	
UP 	
	

	
Karl Suss 2 	
UP 	
	

	
Manual Coaters 	
Status 	
	

	
EVGSpraycoat 	
UP 	
	

	
Headway 	
UP 	
	

	
Laurel 	
PROBLEM 	
Broken wafer 	
1 
	
Coaters 	
Process Status 	
	

	
SVGCoat 	
3612 Process 	
Problem 	
Not dispensing 	
2 
	
220-3 Process 	
Up 	
	

	
220-7 Process 	
Up 	
	

	
SVGCoat2 	
3612 Process 	
Up 	
	

	
3617 Process 	
Up 	
	

	
955-0.7 Process 	
Up 	
	

	
Developers 	
Status 	
	

	
SVGDEV 	
UP 	
	

	
SVGDEV2 	
UP 	
	

	
Ovens / Hotplates 	
Status 	
	

	
BLUEM 	
UP 	
	

	
Blue M 90 C. 	
UP 	
	

	
Blue M 110 C 	
UP 	
	

	
Blue M 150 C 	
UP 	
	

	
Fusion 	
UP 	
	

	
UV-Cure 	
UP 	
	

	
White-Oven 	
UP 	
	

	
YES Vapor Prime 	
PROBLEM 	
Intermittent vacuum problem 	
3 
	
Hotplates- 	
	
	

	
Laurel-left 	
UP 	
	

	
Laurel- right 	
UP 	
	

	
Wenesco- Left 	
UP 	
	

	
90 Deg C 	
UP 	
	

	
115 Deg C 	
UP 	
	

	
Wenesco- Right 	
UP 	
	

	
Metrology/Inspection 	
Status 	
	

	
AFM 	
UP 	
	

	
Alpha-Step 500 	
UP 	
	

	
Flexus Stresstest 	
UP 	
	

	
Nanospec 1-Etch 	
UP 	
	

	
Nanospec 2-Litho 	
UP 	
	

	
Prometrix 	
UP 	
	

	
P2 Profiler 	
UP 	
	

	
Rudolph Ellipsometer 	
UP 	
	

	
Surfscan 4500 	
UP 	
	

	
Woolam 	
UP 	
	

	
Zygo 	
UP 	
	

	
Microscpoes- 	
	
	

	
#1 Leica/ 	
UP 	
	

	
#2 Ergolux/Drytek2 	
UP 	
	

	
#3 Olympus/Litho 	
UP 	
	

	
#4 Nikon Optiphot/Litho 	
UP 	
	

	
#5 Nikon/Litho 	
UP 	
	

	
#6 Leitz/Bosch 	
UP 	
	

	
#7 Leitz/Diffusion 	
UP 	
	

	
#8 Olympus/Litho 	
UP 	
	

	
#9Olympus/Litho 	
UP 	
	

	
Miscellaneous 	
Status 	
	

	
EVBond 	
PROBLEM 	
Clamps are stiff 	
4 
	
KSBonder 	
UP 	
	

	
KSCoat 	
PROBLEM 	
Coolant flow problem 	

	
Litho SRD 	
UP 	
	

	
Mask Cleaner 	
UP 	
	

	
	
	
	



Good morning All...

    Here is the morning Litho status report.

     Please check back in Coral for the latest tool updates and current equipment status

            Thanks.. The Litho Team


Photolithography Quick Snapshot


Monday, November 05, 2012

New Issues

 

 

 

 

Laurel R- Problem: User "kcbalram" reports a broken wafer in process bowl.

SVGCoat- Problem: User "popomoo" reports 3612 resist not dispensing

 

 

 

Old Issues- Ongoing



 

ASML Stepper- Purge hood removed again due to contamination issue and damage to

wafer table optics. The following process restrictions are in effect: 1- No thick resist processing

(3.0 microns and above) until further notice.  Possible re-installation this week but depends

on ASML's available resources.

YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck

on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options.

KSCoat-Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need

to check 3", 5" 6" and 8" wafer sized and re-teach as needed.

 

KS Coat- Problem: User "lindaohara" reports a coolant water flow problem. Investigated

and found the water pump to be bad. Motor is OK. Water pump replaced on 11/2. Good water

flow. Cannot reach setpoint of 21 degrees C.. Suspect bad chiller. Will investigate further.

 

 




 

Resolved Issues

 

 

 

 

 

 

 




 

 

 

 

 

 

Photolithography Area Status


Monday, November 05, 2012

General Information / Lab Activities

 

 

 

Mahnaz- Vacation(10/29 - 11/13)

 

EVG Bonder- Changing pressure plate from Quartz to Steel today(11/5)

 

 

 

Exposure Tools

Status

Comments

Priority

ASML Stepper

PROBLEM

No thick resist processing

5

EVAlign

PROBLEM

Intermittent joystick problem

 

EVAlign2

UP

 

 

EVG-Imprint

PROBLEM

Tool idle til needed

 

Karl Suss 1

UP

 

 

Karl Suss 2

UP

 

 

Manual Coaters

Status

 

 

EVGSpraycoat

UP

 

 

Headway

UP

 

 

Laurel

PROBLEM

Broken wafer

1

Coaters

Process Status

 

 

SVGCoat

3612 Process

Problem

Not dispensing

2

220-3 Process

Up

 

 

220-7 Process

Up

 

 

SVGCoat2

3612 Process

Up

 

 

3617 Process

Up

 

 

955-0.7 Process

Up

 

 

Developers

Status

 

 

SVGDEV

UP

 

 

SVGDEV2

UP

 

 

Ovens / Hotplates

Status

 

 

BLUEM

UP

 

 

Blue M 90 C.

UP

 

 

Blue M 110 C

UP

 

 

Blue M 150 C

UP

 

 

Fusion

UP

 

 

UV-Cure

UP

 

 

White-Oven

UP

 

 

YES Vapor Prime

PROBLEM

Intermittent vacuum problem

3

 Hotplates-

 

 

 

   Laurel-left

UP

 

 

   Laurel- right

UP

 

 

   Wenesco- Left

UP

 

 

   90 Deg C

UP

 

 

   115 Deg C

UP

 

 

   Wenesco- Right

UP

 

 

Metrology/Inspection

Status

 

 

AFM

UP

 

 

Alpha-Step 500

UP

 

 

Flexus Stresstest

UP

 

 

Nanospec 1-Etch

UP

 

 

Nanospec 2-Litho

UP

 

 

Prometrix

UP

 

 

P2 Profiler

UP

 

 

Rudolph Ellipsometer

UP

 

 

Surfscan 4500

UP

 

 

Woolam

UP

 

 

Zygo

UP

 

 

 Microscpoes-

 

 

 

   #1 Leica/

UP

 

 

   #2 Ergolux/Drytek2

UP

 

 

   #3 Olympus/Litho

UP

 

 

   #4 Nikon Optiphot/Litho

UP

 

 

   #5 Nikon/Litho

UP

 

 

   #6 Leitz/Bosch

UP

 

 

   #7 Leitz/Diffusion

UP

 

 

   #8 Olympus/Litho

UP

 

 

   #9Olympus/Litho

UP

 

 

Miscellaneous

Status

 

 

EVBond

PROBLEM

Clamps are stiff

4

KSBonder

UP

 

 

KSCoat

PROBLEM

Coolant flow problem

 

Litho SRD

UP

 

 

Mask Cleaner

UP