Subject: Equipment Status
From: Jim Haydon <jhaydon@snf.stanford.edu>
Date: Mon, 19 Aug 2002 08:43:14 -0700




Balzers:
Gryphon: Power supply failure Gryphon is off line. Will up date later
today as to when it might be fixed.
Implanter:  Valve manifold for end station has been shipped should be
here this week. Implanter is still operational
Innotec:
Metalica:
STS Dep:
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN: