Subject: Equipment Status
From: Jim Haydon <jhaydon@snf.stanford.edu>
Date: Mon, 26 Aug 2002 08:03:15 -0700




Balzers:      Blazers will be down most of 8/29/02 for water system
changes
Gryphon:
Implanter:
Innotec:    Innotec will be shut down for cryopump replacement, it will
also be down for a few hours on 8/29/02 for some work on the balzers
water system
Metalica:   Down for regen should be completed by late afternoon
STS Dep:
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN: