Subject: Equipment Status
From: Jim Haydon <jhaydon@snf.stanford.edu>
Date: Mon, 09 Sep 2002 08:57:42 -0700




Balzers:
Gryphon:
Implanter:     Down for air leak should be fix by this afternoon
Innotec:
Metalica:    Flakes on cylinder wall should be cleaned today
STS Dep:
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN: