Subject: Thinfilms morning report 7/12/04
From: james haydon <jhaydon@snf.stanford.edu>
Date: Mon, 12 Jul 2004 09:44:35 -0700
Mon, 12 Jul 2004 09:44:35 -0700
Thinfilms Morning Report 7/12/2004

 

 

Gryphon:            not well have tried 3 new controllers and turbos 
maybe the fourth one will work.

Innotec;            ok

Balzers :            ok

STS Dep:            leak in nitrogen purge valve on the silane line 
causes extra long purge cycle ok to use though.

Implanter:            ok

Metalica:            ok

SCT:                In start up phase

CPD:                ok                   

WbGen-CTB:            ok

WbGen-RHP:            ok

WbGen:-LHP:            ok

WbGaAs-RHP:            ok

WbGaSa-LHP:            ok

WbSilicide:            ok

WbDif: ok

WbNonmetal:            ok

WbNitride:            ok

WbMetal:            ok

Wbmiscres:            ok

WBOptres:            ok

WBSolvent:            ok

DI water:            ok

LN:                  ok



Thinfilms Morning Report 7/12/2004

 

 

Gryphon:            not well have tried 3 new controllers and turbos maybe the fourth one will work.

Innotec;            ok

Balzers :            ok

STS Dep:            leak in nitrogen purge valve on the silane line causes extra long purge cycle ok to use though.

Implanter:            ok

Metalica:            ok

SCT:                In start up phase

CPD:                ok                   

WbGen-CTB:            ok

WbGen-RHP:            ok

WbGen:-LHP:            ok

WbGaAs-RHP:            ok

WbGaSa-LHP:            ok

WbSilicide:            ok

WbDif: ok

WbNonmetal:            ok

WbNitride:            ok

WbMetal:            ok

Wbmiscres:            ok

WBOptres:            ok

WBSolvent:            ok

DI water:            ok

LN:                  ok