Subject: Equipment Status
From: Jim Haydon <jhaydon@snf.stanford.edu>
Date: Tue, 10 Sep 2002 09:15:31 -0700




Balzers:
Gryphon:
Implanter:   Bad or broken switch on end station vacuum controller
Innotec:
Metalica:
STS Dep:
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN: