Subject: Thinfilms morning report 4/15/05
From: james haydon <jhaydon@snf.stanford.edu>
Date: Fri, 15 Apr 2005 10:13:05 -0700
Fri, 15 Apr 2005 10:13:05 -0700
Thinfilms Morning Report 4/15/2005

 

 

Gryphon:            ok

Innotec;            ok

STS Dep:            ok

Implanter:            ok to use but still has some problem with noise on 
the HV. Down for gas flow problem. Hope to get it fixed early next week

Metalica:            ok

SCT:                down bad ion gauge controller

CPD:                ok                   

WbGen-CTB:            ok

WbGen-RHP:            ok

WbGen:-LHP:            ok

WbGaAs-RHP:            ok

WbGaSa-LHP:            ok

WbSilicide:            ok

WbDif: ok

WbNonmetal:            ok

WbNitride:            ok

WbMetal:            ok

Wbmiscres:            ok

WBOptres:            ok

WBSolvent:            ok

DI water:            ok

LN:                  ok

 



Thinfilms Morning Report 4/15/2005

 

 

Gryphon:            ok

Innotec;            ok

STS Dep:            ok

Implanter:            ok to use but still has some problem with noise on the HV. Down for gas flow problem. Hope to get it fixed early next week

Metalica:            ok

SCT:                down bad ion gauge controller

CPD:                ok                   

WbGen-CTB:            ok

WbGen-RHP:            ok

WbGen:-LHP:            ok

WbGaAs-RHP:            ok

WbGaSa-LHP:            ok

WbSilicide:            ok

WbDif: ok

WbNonmetal:            ok

WbNitride:            ok

WbMetal:            ok

Wbmiscres:            ok

WBOptres:            ok

WBSolvent:            ok

DI water:            ok

LN:                  ok