Subject: Equipment Status
From: Jim Haydon <jhaydon@snf.stanford.edu>
Date: Fri, 04 Oct 2002 11:23:09 -0700




Balzers:   Off line  dead cryo pump hoping to have a replacement next
week
Gryphon:    ok
Implanter:    ok
Innotec:     ok
Metalica:    ok
STS Dep:    ok
wbgen- CTB:    ok
wbgen-LHP:    ok
wbgen-RHP:    ok
wbMETAL:    ok
wbNITRIDE:    ok
wbNONMETAL:    ok
wbDIFF:    ok
wbSILICIDE:    ok
wbGAASCL:    ok
wbMISCRES:    ok
wbOPTRES:    ok
DI WATER:    ok
NITROGEN:    ok