Subject: Diffusion Morning Report 10/04/12
From: Ted Berg <tberg@stanford.edu>
Date: Thu, 04 Oct 2012 06:26:27 -0700
Thu, 04 Oct 2012 06:26:27 -0700
Good Morning All,
*1. New issues:TEL Cooling water flow issue
* *2. Ongoing issues:*No TLC on Thermco 3 and 4,  Tylan Poly rewriting 
recipes,** Tylannitride  tested again waiting further instructions after 
alarms,  working on Badger interlocks,**SEM 4160
*3.  Resolved *:*Germane for Epi is getting low, DCS for Epi?

*
					
	Date: 	10/4/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*up* 	** 	*14.39/30* 	** 	**
Tylan 8-SiGe 	*down* 	*waiting for users* 	*3.4/30* 	** 	**
Tylan 9-Poly 	*down* 	*rewriting recipes-testing revised recipes* 
*23.7/30* 	** 	**
Tylan 10-Nitride 	*down* 	*tested after sih4 alarm,testing more* 
*28.5/30* 	** 	**
Tylan 11-LTO 	*up* 	** 	*0/30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*yellow* 	*testing TLC* 	** 	** 	**
Thermco4 	*yellow* 	*no TLC* 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi Cham. A 	*yellow* 	*DCS flow issues? GeH4 cylinder changed* 
** 	** 	**
AMAT Epi Cham. B 	*down* 	*waiting for permit* 	** 	** 	**
TEL Spa 	*down* 	*cooling water issues* 	** 	** 	*2*
Burn Box 	*up* 	** 	** 	** 	**
SEM 4160 	*yellow* 	*beam issues ?* 	** 	** 	*1*
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	***changeover working 
well*** 	** 	**




Good Morning All,
    1. New issues:TEL Cooling water flow issue
    2. Ongoing issues:No TLC on Thermco 3 and 4,  Tylan Poly rewriting recipes,  Tylannitride  tested again waiting further instructions after alarms,  working on Badger interlocks,  SEM 4160
    3.  Resolved :Germane for Epi is getting low, DCS for Epi?

                   
  Date: 10/4/12 THICKNESS-Change at    Priority
Tube Name/Number Status        
Tylan 1 up        
Tylan 2 up        
Tylan 3 up        
Tylan 4 up        
Tylan 5-BBr3 up        
Tylan 6-POCl3 up        
Tylan 7-TEOS2 up   14.39/30    
Tylan 8-SiGe down waiting for users 3.4/30    
Tylan 9-Poly down rewriting recipes-testing revised recipes 23.7/30    
Tylan 10-Nitride down tested after sih4 alarm,testing more 28.5/30    
Tylan 11-LTO up    0/30    
Tylan 12-FGA up        
Thermco 1 up        
Thermco 2 up        
Thermco 3 yellow testing TLC      
Thermco4 yellow no TLC      
Thermco Poly1 up    
 
Thermco Poly2 up        
Thermco Nitride1 up        
Thermco bpsg up        
AMAT Epi Cham. A yellow DCS flow issues? GeH4 cylinder changed      
AMAT Epi Cham. B down waiting for permit      
TEL Spa down cooling water issues     2
Burn Box up         
SEM 4160 yellow beam issues ?     1
FGA2 up        
SiH4 for furnaces on crossover ok  changeover working well