Wed, 10 Oct 2012 06:55:03 -0700
Good Morning All,
*1. New issues:Cannot put Epi Chamber on line
* *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting
recipes,** Tylannitride tested again waiting further instructions after
alarms, working on Badger interlocks
*3. Resolved *:Changed backup cylinder for DCS
Date: 10/10/12 THICKNESS-Change at Priority
Tube Name/Number Status
Tylan 1 *up* ** ** **
Tylan 2 *up* ** ** **
Tylan 3 *up* ** ** **
Tylan 4 *up* ** ** **
Tylan 5-BBr3 *up* ** ** **
Tylan 6-POCl3 *up* ** ** **
Tylan 7-TEOS2 *up* ** *14.39/30* **
Tylan 8-SiGe *down* *waiting for users* *3.4/30* **
Tylan 9-Poly *down* *rewriting recipes-testing revised recipes*
*23.7/30* **
Tylan 10-Nitride *down* *tested after sih4 alarm,testing more*
*28.5/30* **
Tylan 11-LTO *up* ** *0/30* **
Tylan 12-FGA *up* ** ** **
Thermco 1 *up* ** ** **
Thermco 2 *up* ** ** **
Thermco 3 *yellow* *testing TLC* ** **
Thermco4 *yellow* *no TLC* ** **
Thermco Poly1 *up* ** ** *
*
Thermco Poly2 *up* ** ** **
Thermco Nitride1 *up* ** ** **
Thermco bpsg *up* ** ** **
AMAT Epi Cham. A *down* *cannot put chamber on line* ** **
AMAT Epi Cham. B *down* *waiting for permit* ** **
TEL Spa *up* ** ** **
Burn Box *up* ** ** **
SEM 4160 *up* ** ** **
FGA2 *up* ** ** **
SiH4 for furnaces *on* *crossover ok* ***changeover working well*** **
**
Good Morning All,
1. New issues:Cannot put Epi Chamber on line
2. Ongoing issues:No TLC on Thermco 3 and 4, Tylan
Poly rewriting recipes,
Tylannitride tested again waiting
further instructions after alarms, working on Badger interlocks
3. Resolved :Changed backup cylinder for DCS
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Date: |
10/10/12 |
THICKNESS-Change
at |
|
Priority |
| Tube Name/Number |
Status |
|
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| Tylan 1 |
up |
|
|
|
|
| Tylan 2 |
up |
|
|
|
|
| Tylan 3 |
up |
|
|
|
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| Tylan 4 |
up |
|
|
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|
| Tylan 5-BBr3 |
up |
|
|
|
|
| Tylan 6-POCl3 |
up |
|
|
|
|
| Tylan 7-TEOS2 |
up |
|
14.39/30 |
|
|
| Tylan 8-SiGe |
down |
waiting for users |
3.4/30 |
|
|
| Tylan 9-Poly |
down |
rewriting
recipes-testing revised recipes |
23.7/30 |
|
|
| Tylan 10-Nitride |
down |
tested after sih4
alarm,testing more |
28.5/30 |
|
|
| Tylan 11-LTO |
up |
|
0/30 |
|
|
| Tylan 12-FGA |
up |
|
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|
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| Thermco 1 |
up |
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| Thermco 2 |
up |
|
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| Thermco 3 |
yellow |
testing TLC |
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| Thermco4 |
yellow |
no TLC |
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| Thermco Poly1 |
up |
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| Thermco Poly2 |
up |
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| Thermco Nitride1 |
up |
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| Thermco bpsg |
up |
|
|
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| AMAT Epi
Cham. A |
down |
cannot put chamber
on line |
|
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| AMAT Epi
Cham. B |
down |
waiting for permit |
|
|
|
| TEL Spa |
up |
|
|
|
|
| Burn Box |
up |
|
|
|
|
| SEM 4160 |
up |
|
|
|
|
| FGA2 |
up |
|
|
|
|
| SiH4 for furnaces |
on |
crossover
ok |
changeover
working well |
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