Subject: Diffusion Morning Report 10/10/12
From: Ted Berg <tberg@stanford.edu>
Date: Wed, 10 Oct 2012 06:55:03 -0700
Wed, 10 Oct 2012 06:55:03 -0700
Good Morning All,
*1. New issues:Cannot put Epi Chamber on line
* *2. Ongoing issues:*No TLC on Thermco 3 and 4,  Tylan Poly rewriting 
recipes,** Tylannitride  tested again waiting further instructions after 
alarms,  working on Badger interlocks
*3.  Resolved *:Changed backup cylinder for DCS

					
	Date: 	10/10/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	
Tylan 2 	*up* 	** 	** 	** 	
Tylan 3 	*up* 	** 	** 	** 	
Tylan 4 	*up* 	** 	** 	** 	
Tylan 5-BBr3 	*up* 	** 	** 	** 	
Tylan 6-POCl3 	*up* 	** 	** 	** 	
Tylan 7-TEOS2 	*up* 	** 	*14.39/30* 	** 	
Tylan 8-SiGe 	*down* 	*waiting for users* 	*3.4/30* 	** 	
Tylan 9-Poly 	*down* 	*rewriting recipes-testing revised recipes* 
*23.7/30* 	** 	
Tylan 10-Nitride 	*down* 	*tested after sih4 alarm,testing more* 
*28.5/30* 	** 	
Tylan 11-LTO 	*up* 	** 	*0/30* 	** 	
Tylan 12-FGA 	*up* 	** 	** 	** 	
Thermco 1 	*up* 	** 	** 	** 	
Thermco 2 	*up* 	** 	** 	** 	
Thermco 3 	*yellow* 	*testing TLC* 	** 	** 	
Thermco4 	*yellow* 	*no TLC* 	** 	** 	
Thermco Poly1 	*up* 	** 	** 	*
* 	
Thermco Poly2 	*up* 	** 	** 	** 	
Thermco Nitride1 	*up* 	** 	** 	** 	
Thermco bpsg 	*up* 	** 	** 	** 	
AMAT Epi Cham. A 	*down* 	*cannot put chamber on line* 	** 	** 	
AMAT Epi Cham. B 	*down* 	*waiting for permit* 	** 	** 	
TEL Spa 	*up* 	** 	** 	** 	
Burn Box 	*up* 	** 	** 	** 	
SEM 4160 	*up* 	** 	** 	** 	
FGA2 	*up* 	** 	** 	** 	
SiH4 for furnaces 	*on* 	*crossover ok* 	***changeover working well*** 	** 	



**


Good Morning All,
    1. New issues:Cannot put Epi Chamber on line
    2. Ongoing issues:No TLC on Thermco 3 and 4,  Tylan Poly rewriting recipes,  Tylannitride  tested again waiting further instructions after alarms,  working on Badger interlocks
    3.  Resolved :Changed backup cylinder for DCS

                   
  Date: 10/10/12 THICKNESS-Change at    Priority
Tube Name/Number Status        
Tylan 1 up        
Tylan 2 up        
Tylan 3 up        
Tylan 4 up        
Tylan 5-BBr3 up        
Tylan 6-POCl3 up        
Tylan 7-TEOS2 up   14.39/30    
Tylan 8-SiGe down waiting for users 3.4/30    
Tylan 9-Poly down rewriting recipes-testing revised recipes 23.7/30    
Tylan 10-Nitride down tested after sih4 alarm,testing more 28.5/30    
Tylan 11-LTO up    0/30    
Tylan 12-FGA up        
Thermco 1 up        
Thermco 2 up        
Thermco 3 yellow testing TLC      
Thermco4 yellow no TLC      
Thermco Poly1 up    
 
Thermco Poly2 up        
Thermco Nitride1 up        
Thermco bpsg up        
AMAT Epi Cham. A down cannot put chamber on line      
AMAT Epi Cham. B down waiting for permit      
TEL Spa up        
Burn Box up         
SEM 4160 up        
FGA2 up        
SiH4 for furnaces on crossover ok  changeover working well