Thu, 11 Oct 2012 06:11:11 -0700
Good Morning All,
*1. New issues:Tylan LTO pump replaced-tube broken
* *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting
recipes,** Tylannitride tested again waiting further instructions after
alarms, working on Badger interlocks,*Cannot put Epi Chamber on
line-creeping H2 regulator*-New reg will be at least next week.
*3. Resolved *:Tylan LTO pump replaced
Date: 10/11/12 THICKNESS-Change at Priority
Tube Name/Number Status
Tylan 1 *up* ** ** ** **
Tylan 2 *up* ** ** ** **
Tylan 3 *up* ** ** ** **
Tylan 4 *up* ** ** ** **
Tylan 5-BBr3 *up* ** ** ** **
Tylan 6-POCl3 *up* ** ** ** **
Tylan 7-TEOS2 *up* ** *14.39/30* ** **
Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** **
Tylan 9-Poly *down* *rewriting recipes-testing revised recipes*
*23.7/30* ** **
Tylan 10-Nitride *down* *tested after sih4 alarm,testing more*
*28.5/30* ** **
Tylan 11-LTO *down* *Pump replaced , tube broken* *0/30* ** * 1*
Tylan 12-FGA *up* ** ** ** **
Thermco 1 *up* ** ** ** **
Thermco 2 *up* ** ** ** **
Thermco 3 *yellow* *testing TLC* ** ** **
Thermco4 *yellow* *no TLC* ** ** **
Thermco Poly1 *up* ** ** *
* **
Thermco Poly2 *up* ** ** ** **
Thermco Nitride1 *up* ** ** ** **
Thermco bpsg *up* ** ** ** **
AMAT Epi Cham. A *down* *cannot put chamber on line-H2 reg
creep* ** ** * 2*
AMAT Epi Cham. B *down* *waiting for permit-drawings with John
B* ** ** **
TEL Spa *up* ** ** ** **
Burn Box *up* ** ** ** **
SEM 4160 *up* ** ** ** **
FGA2 *up* ** ** ** **
SiH4 for furnaces *on* *crossover ok* ***changeover working
well*** ** **
Good Morning All,
1. New issues:Tylan LTO pump replaced-tube broken
2. Ongoing issues:No TLC on Thermco 3 and 4, Tylan
Poly rewriting recipes,
Tylannitride tested again waiting
further instructions after alarms, working on Badger interlocks,
Cannot
put Epi Chamber on line-creeping H2 regulator-New reg will be
at least next week.
3. Resolved :Tylan LTO pump replaced
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Date: |
10/11/12 |
THICKNESS-Change
at |
|
Priority |
| Tube Name/Number |
Status |
|
|
|
|
| Tylan 1 |
up |
|
|
|
|
| Tylan 2 |
up |
|
|
|
|
| Tylan 3 |
up |
|
|
|
|
| Tylan 4 |
up |
|
|
|
|
| Tylan 5-BBr3 |
up |
|
|
|
|
| Tylan 6-POCl3 |
up |
|
|
|
|
| Tylan 7-TEOS2 |
up |
|
14.39/30 |
|
|
| Tylan 8-SiGe |
down |
waiting for users |
3.4/30 |
|
|
| Tylan 9-Poly |
down |
rewriting
recipes-testing revised recipes |
23.7/30 |
|
|
| Tylan 10-Nitride |
down |
tested after sih4
alarm,testing more |
28.5/30 |
|
|
| Tylan 11-LTO |
down |
Pump replaced ,
tube broken |
0/30 |
|
1 |
| Tylan 12-FGA |
up |
|
|
|
|
| Thermco 1 |
up |
|
|
|
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| Thermco 2 |
up |
|
|
|
|
| Thermco 3 |
yellow |
testing TLC |
|
|
|
| Thermco4 |
yellow |
no TLC |
|
|
|
| Thermco Poly1 |
up |
|
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| Thermco Poly2 |
up |
|
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| Thermco Nitride1 |
up |
|
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|
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| Thermco bpsg |
up |
|
|
|
|
| AMAT Epi
Cham. A |
down |
cannot put chamber
on line-H2 reg creep |
|
|
2 |
| AMAT Epi
Cham. B |
down |
waiting for
permit-drawings with John B |
|
|
|
| TEL Spa |
up |
|
|
|
|
| Burn Box |
up |
|
|
|
|
| SEM 4160 |
up |
|
|
|
|
| FGA2 |
up |
|
|
|
|
| SiH4 for furnaces |
on |
crossover
ok |
changeover
working well |
|
|