Thu, 01 Nov 2012 06:25:05 -0700
Good Morning All,
*1. New issues:Tylan 2 and 3 low growth,Thermco Poly1 bad manometer
* *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride
tested again waiting further instructions after alarms, working on
Badger interlocks,Epi regulator assy installed but still
creeps,*Thermco Nitride slow pumping speed.,**particles on back of Epi
wafers*,*O2 in Silane? on Epi*
*3. Resolved *:*TEOS canister replaced,
*
Date: 11/1/12 THICKNESS-Change at Priority
Tube Name/Number Status
Tylan 1 *up* ** ** ** **
Tylan 2 *yellow* *low dep* ** ** *2*
Tylan 3 *yellow* *low dep* ** ** *2*
Tylan 4 *up* ** ** ** **
Tylan 5-BBr3 *up* ** ** ** **
Tylan 6-POCl3 *up* ** ** ** **
Tylan 7-TEOS2 *up* *cannister empty-replaced* *14.39/30* ** **
Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** **
Tylan 9-Poly *down* *rewriting recipes-testing revised recipes*
*23.7/30* ** **
Tylan 10-Nitride *down* *tested after sih4 alarm,testing more*
*28.5/30* ** **
Tylan 11-LTO *up* ** *4.3/30* ** **
Tylan 12-FGA *up* ** ** ** **
Thermco 1 *up* ** ** ** **
Thermco 2 *up* ** ** ** **
Thermco 3 *up* ** ** ** **
Thermco4 *up* ** ** ** **
Thermco Poly1 *yellow* *pump manometer bad* ** *
* *3*
Thermco Poly2 *up* ** ** ** **
Thermco Nitride1 *yellow* *slow pumping speed-poor uniformity-pump
ordered* ** ** **
Thermco bpsg *up* ** ** ** **
AMAT Epi Cham. A *yellow* *O2 in sih4?possible particles* ** ** *1*
AMAT Epi Cham. B *down* ***At the county* ** ** **
TEL Spa *up* ** ** ** **
Burn Box *up* ** ** ** **
SEM 4160 *up* ** ** ** **
FGA2 *up* ** ** ** **
SiH4 for furnaces *on* *crossover ok* ***changeover working
well*** ** **
Good Morning All,
1. New issues:Tylan 2 and 3 low growth,Thermco Poly1 bad
manometer
2. Ongoing issues:Tylan Poly rewriting recipes,
Tylannitride tested again waiting further instructions after
alarms, working on Badger interlocks,Epi regulator assy installed
but still creeps,
Thermco Nitride slow pumping speed.,particles
on back of Epi wafers,
O2 in Silane? on Epi
3. Resolved :
TEOS canister replaced,
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Date: |
11/1/12 |
THICKNESS-Change
at |
|
Priority |
| Tube Name/Number |
Status |
|
|
|
|
| Tylan 1 |
up |
|
|
|
|
| Tylan 2 |
yellow |
low dep |
|
|
2 |
| Tylan 3 |
yellow |
low dep |
|
|
2 |
| Tylan 4 |
up |
|
|
|
|
| Tylan 5-BBr3 |
up |
|
|
|
|
| Tylan 6-POCl3 |
up |
|
|
|
|
| Tylan 7-TEOS2 |
up |
cannister
empty-replaced |
14.39/30 |
|
|
| Tylan 8-SiGe |
down |
waiting for users |
3.4/30 |
|
|
| Tylan 9-Poly |
down |
rewriting
recipes-testing revised recipes |
23.7/30 |
|
|
| Tylan 10-Nitride |
down |
tested after sih4
alarm,testing more |
28.5/30 |
|
|
| Tylan 11-LTO |
up |
|
4.3/30 |
|
|
| Tylan 12-FGA |
up |
|
|
|
|
| Thermco 1 |
up |
|
|
|
|
| Thermco 2 |
up |
|
|
|
|
| Thermco 3 |
up |
|
|
|
|
| Thermco4 |
up |
|
|
|
|
| Thermco Poly1 |
yellow |
pump manometer bad |
|
|
3 |
| Thermco Poly2 |
up |
|
|
|
|
| Thermco Nitride1 |
yellow |
slow pumping
speed-poor uniformity-pump ordered |
|
|
|
| Thermco bpsg |
up |
|
|
|
|
| AMAT Epi
Cham. A |
yellow |
O2 in
sih4?possible particles |
|
|
1 |
| AMAT Epi
Cham. B |
down |
At the county |
|
|
|
| TEL Spa |
up |
|
|
|
|
| Burn Box |
up |
|
|
|
|
| SEM 4160 |
up |
|
|
|
|
| FGA2 |
up |
|
|
|
|
| SiH4 for furnaces |
on |
crossover
ok |
changeover
working well |
|
|