Subject: Diffusion Morning Report 11/02/12
From: Ted Berg <tberg@stanford.edu>
Date: Fri, 02 Nov 2012 06:42:19 -0700
Fri, 02 Nov 2012 06:42:19 -0700
Good Morning All,
*1. New issues:TEL Spa low coolant
* *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride  
tested again waiting further instructions after alarms,  working on 
Badger interlocks,Epi regulator  assy installed but still 
creeps,*Thermco Nitride slow pumping speed.,**particles on back of Epi 
wafers*,*O2 in Silane? on Epi*,*Tylan 2 and 3 low growth,*
*3.  Resolved *:*Thermco Poly 1 manometer replaced,Tel SPA coolant 
added, Tylan 2 and 3 need test after repair

*
					
	Date: 	11/2/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*yellow* 	*low dep-needs test* 	** 	** 	*2*
Tylan 3 	*yellow* 	*low dep-needs test* 	** 	** 	*2*
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*up* 	** 	*14.39/30* 	** 	**
Tylan 8-SiGe 	*down* 	*waiting for users* 	*3.4/30* 	** 	**
Tylan 9-Poly 	*down* 	*rewriting recipes-testing revised recipes* 
*23.7/30* 	** 	**
Tylan 10-Nitride 	*down* 	*tested after sih4 alarm,testing more* 
*28.5/30* 	** 	**
Tylan 11-LTO 	*up* 	** 	*4.3/30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*up* 	** 	** 	** 	**
Thermco4 	*up* 	** 	** 	** 	**
Thermco Poly1 	*up* 	*replaced pump manometer*** 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*yellow* 	*slow pumping speed-poor uniformity-pump 
ordered* 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi Cham. A 	*yellow* 	*O2 in sih4?possible particles* 	** 	** 	*1*
AMAT Epi Cham. B 	*down* 	***At the county* 	** 	** 	**
TEL Spa 	*up* 	*added coolant to chiller and restarted* 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
SEM 4160 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	***changeover working 
well*** 	** 	**



Good Morning All,
    1. New issues:TEL Spa low coolant
    2. Ongoing issues:Tylan Poly rewriting recipes,  Tylannitride  tested again waiting further instructions after alarms,  working on Badger interlocks,Epi regulator  assy installed but still creeps,Thermco Nitride slow pumping speed.,particles on back of Epi wafers,O2 in Silane? on Epi,Tylan 2 and 3 low growth,
    3.  Resolved :Thermco Poly 1 manometer replaced,Tel SPA coolant added, Tylan 2 and 3 need test after repair


                   
  Date: 11/2/12 THICKNESS-Change at    Priority
Tube Name/Number Status        
Tylan 1 up        
Tylan 2 yellow low dep-needs test     2
Tylan 3 yellow low dep-needs test     2
Tylan 4 up        
Tylan 5-BBr3 up        
Tylan 6-POCl3 up        
Tylan 7-TEOS2 up   14.39/30    
Tylan 8-SiGe down waiting for users 3.4/30    
Tylan 9-Poly down rewriting recipes-testing revised recipes 23.7/30    
Tylan 10-Nitride down tested after sih4 alarm,testing more 28.5/30    
Tylan 11-LTO up   4.3/30    
Tylan 12-FGA up        
Thermco 1 up        
Thermco 2 up        
Thermco 3 up        
Thermco4 up        
Thermco Poly1 up replaced pump manometer   
 
Thermco Poly2 up        
Thermco Nitride1 yellow slow pumping speed-poor uniformity-pump ordered      
Thermco bpsg up        
AMAT Epi Cham. A yellow O2 in sih4?possible particles     1
AMAT Epi Cham. B down  At the county      
TEL Spa up added coolant to chiller and restarted      
Burn Box up         
SEM 4160 up        
FGA2 up        
SiH4 for furnaces on crossover ok  changeover working well