Mon, 05 Nov 2012 06:32:28 -0800
Good Morning All,
*1. New issues:User Jasonlin reported pressure control errors on Epi,
but many users followed with none
* *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride
tested again waiting further instructions after alarms, working on
Badger interlocks,Epi regulator assy installed but still
creeps,*Thermco Nitride slow pumping speed.,**particles on back of Epi
wafers*,*O2 in Silane? on Epi*,*Tylan 2 low growth,*
*3. Resolved *:*Tylan 3 ok after repair**
*
Date: 11/5/12 THICKNESS-Change at Priority
Tube Name/Number Status
Tylan 1 *up* ** ** ** **
Tylan 2 *yellow* *still low dep* ** ** *2*
Tylan 3 *up* ** ** ** **
Tylan 4 *up* ** ** ** **
Tylan 5-BBr3 *up* ** ** ** **
Tylan 6-POCl3 *up* ** ** ** **
Tylan 7-TEOS2 *up* ** *14.39/30* ** **
Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** **
Tylan 9-Poly *down* *rewriting recipes-testing revised recipes*
*23.7/30* ** **
Tylan 10-Nitride *down* *tested after sih4 alarm,testing more*
*28.5/30* ** **
Tylan 11-LTO *up* ** *4.3/30* ** **
Tylan 12-FGA *up* ** ** ** **
Thermco 1 *up* ** ** ** **
Thermco 2 *up* ** ** ** **
Thermco 3 *up* ** ** ** **
Thermco4 *up* ** ** ** **
Thermco Poly1 *up* ** ** *
* **
Thermco Poly2 *up* ** ** ** **
Thermco Nitride1 *yellow* *slow pumping speed-poor uniformity-pump
ordered* ** ** **
Thermco bpsg *up* ** ** ** **
AMAT Epi Cham. A *yellow* *O2 in sih4?possible particles, H2 reg
creep* ** ** *1*
AMAT Epi Cham. B *down* ***At the county* ** ** **
TEL Spa *up* ** ** ** **
Burn Box *up* ** ** ** **
SEM 4160 *up* ** ** ** **
FGA2 *up* ** ** ** **
SiH4 for furnaces *on* *crossover ok* ***changeover working
well*** ** **
Good Morning All,
1. New issues:User Jasonlin reported pressure control errors
on Epi, but many users followed with none
2. Ongoing issues:Tylan Poly rewriting recipes,
Tylannitride tested again waiting further instructions after
alarms, working on Badger interlocks,Epi regulator assy installed
but still creeps,
Thermco Nitride slow pumping speed.,particles
on back of Epi wafers,
O2 in Silane? on Epi,
Tylan 2
low growth,
3. Resolved :
Tylan 3 ok after repair
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Date: |
11/5/12 |
THICKNESS-Change
at |
|
Priority |
| Tube Name/Number |
Status |
|
|
|
|
| Tylan 1 |
up |
|
|
|
|
| Tylan 2 |
yellow |
still low dep |
|
|
2 |
| Tylan 3 |
up |
|
|
|
|
| Tylan 4 |
up |
|
|
|
|
| Tylan 5-BBr3 |
up |
|
|
|
|
| Tylan 6-POCl3 |
up |
|
|
|
|
| Tylan 7-TEOS2 |
up |
|
14.39/30 |
|
|
| Tylan 8-SiGe |
down |
waiting for users |
3.4/30 |
|
|
| Tylan 9-Poly |
down |
rewriting
recipes-testing revised recipes |
23.7/30 |
|
|
| Tylan 10-Nitride |
down |
tested after sih4
alarm,testing more |
28.5/30 |
|
|
| Tylan 11-LTO |
up |
|
4.3/30 |
|
|
| Tylan 12-FGA |
up |
|
|
|
|
| Thermco 1 |
up |
|
|
|
|
| Thermco 2 |
up |
|
|
|
|
| Thermco 3 |
up |
|
|
|
|
| Thermco4 |
up |
|
|
|
|
| Thermco Poly1 |
up |
|
|
|
|
| Thermco Poly2 |
up |
|
|
|
|
| Thermco Nitride1 |
yellow |
slow pumping
speed-poor uniformity-pump ordered |
|
|
|
| Thermco bpsg |
up |
|
|
|
|
| AMAT Epi
Cham. A |
yellow |
O2 in
sih4?possible particles, H2 reg creep |
|
|
1 |
| AMAT Epi
Cham. B |
down |
At the county |
|
|
|
| TEL Spa |
up |
|
|
|
|
| Burn Box |
up |
|
|
|
|
| SEM 4160 |
up |
|
|
|
|
| FGA2 |
up |
|
|
|
|
| SiH4 for furnaces |
on |
crossover
ok |
changeover
working well |
|
|