Tue, 06 Nov 2012 06:24:07 -0800
Good Morning All,
*1. New issues:user jaeh***lee* reported MFS Alarms on Tylan LTO, user
qran reported leaks on Thermco Nitride,Tylan 2 and 3 have H2 flow issues
* *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride
tested again waiting further instructions after alarms, working on
Badger interlocks,*Thermco Nitride slow pumping speed.,**particles on
back of Epi wafers*,*O2 in Silane? on Epi*,*Tylan 2 low growth,*
*3. Resolved *:*Epi H2 stick replaced 3rd time looks OK now**
*
Date: 11/6/12 THICKNESS-Change at Priority
Tube Name/Number Status
Tylan 1 *up* ** ** ** **
Tylan 2 *down* *H2 flow issues* ** ** *3*
Tylan 3 *down* *H2 flow issues* ** ** *3*
Tylan 4 *up* ** ** ** **
Tylan 5-BBr3 *up* ** ** ** **
Tylan 6-POCl3 *up* ** ** ** **
Tylan 7-TEOS2 *up* ** *14.39/30* ** **
Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** **
Tylan 9-Poly *down* *rewriting recipes-testing revised recipes*
*23.7/30* ** **
Tylan 10-Nitride *down* *tested after sih4 alarm,testing more*
*28.5/30* ** **
Tylan 11-LTO *up* ** *4.3/30* ** **
Tylan 12-FGA *up* ** ** ** **
Thermco 1 *up* ** ** ** **
Thermco 2 *up* ** ** ** **
Thermco 3 *up* ** ** ** **
Thermco4 *up* ** ** ** **
Thermco Poly1 *up* ** ** *
* **
Thermco Poly2 *up* ** ** ** **
Thermco Nitride1 *yellow* *leak,slow pumping speed-poor
uniformity-pump ordered* ** ** **
Thermco bpsg *down* *Mfsalarms* ** ** *2*
AMAT Epi Cham. A *yellow* *O2 in sih4?possible particles* ** ** *1*
AMAT Epi Cham. B *down* ***At the county* ** ** **
TEL Spa *up* ** ** ** **
Burn Box *up* ** ** ** **
SEM 4160 *up* ** ** ** **
FGA2 *up* ** ** ** **
SiH4 for furnaces *on* *crossover ok* ***changeover working
well*** ** **
Good Morning All,
1. New issues:user jaehlee reported MFS Alarms
on Tylan LTO, user qran reported leaks on Thermco Nitride,Tylan 2
and 3 have H2 flow issues
2. Ongoing issues:Tylan Poly rewriting recipes,
Tylannitride tested again waiting further instructions after
alarms, working on Badger interlocks,
Thermco Nitride slow
pumping speed.,particles on back of Epi wafers,
O2 in
Silane? on Epi,
Tylan 2 low growth,
3. Resolved :
Epi H2 stick replaced 3rd time looks
OK now
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Date: |
11/6/12 |
THICKNESS-Change
at |
|
Priority |
| Tube Name/Number |
Status |
|
|
|
|
| Tylan 1 |
up |
|
|
|
|
| Tylan 2 |
down |
H2 flow issues |
|
|
3 |
| Tylan 3 |
down |
H2 flow issues |
|
|
3 |
| Tylan 4 |
up |
|
|
|
|
| Tylan 5-BBr3 |
up |
|
|
|
|
| Tylan 6-POCl3 |
up |
|
|
|
|
| Tylan 7-TEOS2 |
up |
|
14.39/30 |
|
|
| Tylan 8-SiGe |
down |
waiting for users |
3.4/30 |
|
|
| Tylan 9-Poly |
down |
rewriting
recipes-testing revised recipes |
23.7/30 |
|
|
| Tylan 10-Nitride |
down |
tested after sih4
alarm,testing more |
28.5/30 |
|
|
| Tylan 11-LTO |
up |
|
4.3/30 |
|
|
| Tylan 12-FGA |
up |
|
|
|
|
| Thermco 1 |
up |
|
|
|
|
| Thermco 2 |
up |
|
|
|
|
| Thermco 3 |
up |
|
|
|
|
| Thermco4 |
up |
|
|
|
|
| Thermco Poly1 |
up |
|
|
|
|
| Thermco Poly2 |
up |
|
|
|
|
| Thermco Nitride1 |
yellow |
leak,slow pumping
speed-poor uniformity-pump ordered |
|
|
|
| Thermco bpsg |
down |
Mfsalarms |
|
|
2 |
| AMAT Epi
Cham. A |
yellow |
O2 in
sih4?possible particles |
|
|
1 |
| AMAT Epi
Cham. B |
down |
At the county |
|
|
|
| TEL Spa |
up |
|
|
|
|
| Burn Box |
up |
|
|
|
|
| SEM 4160 |
up |
|
|
|
|
| FGA2 |
up |
|
|
|
|
| SiH4 for furnaces |
on |
crossover
ok |
changeover
working well |
|
|