Wed, 07 Nov 2012 06:58:32 -0800
Good Morning All,
*1. New issues:user **jasonlin reports peeling on LTO-its normal, User
junam reports no HCL flow
* *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride
tested again waiting further instructions after alarms, working on
Badger interlocks,*Thermco Nitride slow pumping speed.,**particles on
back of Epi wafers*,*O2 in Silane? on Epi*,*Tylan 2 low growth,**Tylan
2 H2 flow issues*
*3. Resolved *:*Ray resolved gas flows on Tylan 3, Switched HCL
cylinders, Ordered new cassettes for Epi2
*
Date: 11/5/12 THICKNESS-Change at Priority
Tube Name/Number Status
Tylan 1 *up* ** ** ** **
Tylan 2 *down* *H2 flow issues* ** ** *2*
Tylan 3 *up* *needs test* ** ** **
Tylan 4 *up* ** ** ** **
Tylan 5-BBr3 *up* ** ** ** **
Tylan 6-POCl3 *up* ** ** ** **
Tylan 7-TEOS2 *up* ** *14.39/30* ** **
Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** **
Tylan 9-Poly *down* *rewriting recipes-testing revised recipes*
*23.7/30* ** **
Tylan 10-Nitride *down* *tested after sih4 alarm,testing more*
*28.5/30* ** **
Tylan 11-LTO *yellow* *particles* *4.3/30* ** *2*
Tylan 12-FGA *up* ** ** ** **
Thermco 1 *up* ** ** ** **
Thermco 2 *up* ** ** ** **
Thermco 3 *up* ** ** ** **
Thermco4 *up* ** ** ** **
Thermco Poly1 *up* ** ** *
* **
Thermco Poly2 *up* ** ** ** **
Thermco Nitride1 *yellow* *slow pumping speed-poor uniformity-pump
ordered* ** ** **
Thermco bpsg *up* ** ** ** **
AMAT Epi Cham. A *yellow* *O2 in SiH4?,HCL cylinder change* ** ** *1*
AMAT Epi Cham. B *down* ***At the county* ** ** **
TEL Spa *up* ** ** ** **
Burn Box *up* ** ** ** **
SEM 4160 *up* ** ** ** **
FGA2 *up* ** ** ** **
SiH4 for furnaces *on* *crossover ok* ***changeover working
well*** ** **
Good Morning All,
1. New issues:user jasonlin reports peeling on
LTO-its normal, User junam reports no HCL flow
2. Ongoing issues:Tylan Poly rewriting recipes,
Tylannitride tested again waiting further instructions after
alarms, working on Badger interlocks,
Thermco Nitride slow
pumping speed.,particles on back of Epi wafers,
O2 in
Silane? on Epi,
Tylan 2 low growth,Tylan 2 H2 flow
issues
3. Resolved :
Ray resolved gas flows on Tylan 3,
Switched HCL cylinders, Ordered new cassettes for Epi2
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Date: |
11/5/12 |
THICKNESS-Change
at |
|
Priority |
| Tube Name/Number |
Status |
|
|
|
|
| Tylan 1 |
up |
|
|
|
|
| Tylan 2 |
down |
H2 flow issues |
|
|
2 |
| Tylan 3 |
up |
needs test |
|
|
|
| Tylan 4 |
up |
|
|
|
|
| Tylan 5-BBr3 |
up |
|
|
|
|
| Tylan 6-POCl3 |
up |
|
|
|
|
| Tylan 7-TEOS2 |
up |
|
14.39/30 |
|
|
| Tylan 8-SiGe |
down |
waiting for users |
3.4/30 |
|
|
| Tylan 9-Poly |
down |
rewriting
recipes-testing revised recipes |
23.7/30 |
|
|
| Tylan 10-Nitride |
down |
tested after sih4
alarm,testing more |
28.5/30 |
|
|
| Tylan 11-LTO |
yellow |
particles |
4.3/30 |
|
2 |
| Tylan 12-FGA |
up |
|
|
|
|
| Thermco 1 |
up |
|
|
|
|
| Thermco 2 |
up |
|
|
|
|
| Thermco 3 |
up |
|
|
|
|
| Thermco4 |
up |
|
|
|
|
| Thermco Poly1 |
up |
|
|
|
|
| Thermco Poly2 |
up |
|
|
|
|
| Thermco Nitride1 |
yellow |
slow pumping
speed-poor uniformity-pump ordered |
|
|
|
| Thermco bpsg |
up |
|
|
|
|
| AMAT Epi
Cham. A |
yellow |
O2 in SiH4?,HCL
cylinder change |
|
|
1 |
| AMAT Epi
Cham. B |
down |
At the county |
|
|
|
| TEL Spa |
up |
|
|
|
|
| Burn Box |
up |
|
|
|
|
| SEM 4160 |
up |
|
|
|
|
| FGA2 |
up |
|
|
|
|
| SiH4 for furnaces |
on |
crossover
ok |
changeover
working well |
|
|