Fri, 09 Nov 2012 06:54:54 -0800
Good Morning All,
*1. New issues**:Running leak rates and tests on Epi
* *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride
tested again waiting further instructions after alarms, working on
Badger interlocks,*,**particles on back of Epi wafers*,*O2 in Silane? on
Epi*,*:Thermco nitride shutdown can't pump pump here next week*,*Tylan
LTO mfs errors-checking it out*
*3. Resolved *:Epi lamps changed*Ray resolved gas flows on Tylan 2
needs test, Ordered new cassettes for Epi2
*
Date: 11/9/12 THICKNESS-Change at Priority
Tube Name/Number Status
Tylan 1 *up* ** ** ** **
Tylan 2 *yellow* *needs test* ** ** **
Tylan 3 *up* ** ** ** **
Tylan 4 *up* ** ** ** **
Tylan 5-BBr3 *up* ** ** ** **
Tylan 6-POCl3 *up* ** ** ** **
Tylan 7-TEOS2 *up* ** *14.39/30* ** **
Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** **
Tylan 9-Poly *down* *rewriting recipes-testing revised recipes*
*23.7/30* ** **
Tylan 10-Nitride *down* *tested after sih4 alarm,testing more*
*28.5/30* ** **
Tylan 11-LTO *yellow* *mfs alarms* *4.3/30* ** *2*
Tylan 12-FGA *up* ** ** ** **
Thermco 1 *up* ** ** ** **
Thermco 2 *up* ** ** ** **
Thermco 3 *up* ** ** ** **
Thermco4 *up* ** ** ** **
Thermco Poly1 *up* ** ** *
* **
Thermco Poly2 *up* ** ** ** **
Thermco Nitride1 *down* *pump cannot maintain pressure-newpump next
week* ** ** **
Thermco bpsg *up* ** ** ** **
AMAT Epi Cham. A *yellow* *O2 in SiH4?, running leak rates* ** ** *1*
AMAT Epi Cham. B *down* ***At the county* ** ** **
TEL Spa *up* ** ** ** **
Burn Box *up* ** ** ** **
SEM 4160 *up* ** ** ** **
FGA2 *up* ** ** ** **
SiH4 for furnaces *on* *crossover ok* ***changeover working
well*** ** **
Good Morning All,
1. New issues:Running leak rates and tests on Epi
2. Ongoing issues:Tylan Poly rewriting recipes,
Tylannitride tested again waiting further instructions after
alarms, working on Badger interlocks,
,particles on back
of Epi wafers,
O2 in Silane? on Epi,
:Thermco nitride
shutdown can't pump pump here next week,
Tylan LTO mfs
errors-checking it out
3. Resolved :Epi lamps changed
Ray resolved gas
flows on Tylan 2 needs test, Ordered new cassettes for Epi2
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Date: |
11/9/12 |
THICKNESS-Change
at |
|
Priority |
| Tube Name/Number |
Status |
|
|
|
|
| Tylan 1 |
up |
|
|
|
|
| Tylan 2 |
yellow |
needs test |
|
|
|
| Tylan 3 |
up |
|
|
|
|
| Tylan 4 |
up |
|
|
|
|
| Tylan 5-BBr3 |
up |
|
|
|
|
| Tylan 6-POCl3 |
up |
|
|
|
|
| Tylan 7-TEOS2 |
up |
|
14.39/30 |
|
|
| Tylan 8-SiGe |
down |
waiting for users |
3.4/30 |
|
|
| Tylan 9-Poly |
down |
rewriting
recipes-testing revised recipes |
23.7/30 |
|
|
| Tylan 10-Nitride |
down |
tested after sih4
alarm,testing more |
28.5/30 |
|
|
| Tylan 11-LTO |
yellow |
mfs alarms |
4.3/30 |
|
2 |
| Tylan 12-FGA |
up |
|
|
|
|
| Thermco 1 |
up |
|
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|
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| Thermco 2 |
up |
|
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| Thermco 3 |
up |
|
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| Thermco4 |
up |
|
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|
| Thermco Poly1 |
up |
|
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| Thermco Poly2 |
up |
|
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| Thermco Nitride1 |
down |
pump cannot
maintain pressure-newpump next week |
|
|
|
| Thermco bpsg |
up |
|
|
|
|
| AMAT Epi
Cham. A |
yellow |
O2 in SiH4?,
running leak rates |
|
|
1 |
| AMAT Epi
Cham. B |
down |
At the county |
|
|
|
| TEL Spa |
up |
|
|
|
|
| Burn Box |
up |
|
|
|
|
| SEM 4160 |
up |
|
|
|
|
| FGA2 |
up |
|
|
|
|
| SiH4 for furnaces |
on |
crossover
ok |
changeover
working well |
|
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