Tue, 13 Nov 2012 06:11:45 -0800
Good Morning All,
*1. New issues**: No GerH4 on EPi-should be here Thursday
* *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride
tested again waiting further instructions after alarms, working on
Badger interlocks,*,**particles on back of Epi wafers*,*O2 in Silane?
*,*:Thermco nitride shutdown can't pump pump here end of week*,*POCl3
smells*
*3. Resolved *:*Thermco Poly2engaged clutch,Replaced FGA cylinders,
Reset Tylan 1 no overtemp, **,Thermco 1 low growth*-ran a test run all
flows and temps normal,Epi adjusted hot idle power
Date: 11/12/12 THICKNESS-Change at Priority
Tube Name/Number Status
Tylan 1 *up* ** ** ** **
Tylan 2 *yellow* *needs test* ** ** **
Tylan 3 *up* ** ** ** **
Tylan 4 *up* ** ** ** **
Tylan 5-BBr3 *up* ** ** ** **
Tylan 6-POCl3 *yellow* *chlorine smells* ** ** **
Tylan 7-TEOS2 *up* ** *14.39/30* ** **
Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** **
Tylan 9-Poly *down* *rewriting recipes-testing revised recipes*
*23.7/30* ** **
Tylan 10-Nitride *down* *tested after sih4 alarm,testing more*
*28.5/30* ** **
Tylan 11-LTO *yellow* ** *4.3/30* ** **
Tylan 12-FGA *up* ** ** ** **
Thermco 1 *yellow* *trial run looked OK* ** ** **
Thermco 2 *up* ** ** ** **
Thermco 3 *up* ** ** ** **
Thermco4 *up* ** ** ** **
Thermco Poly1 *up* ** ** *
* **
Thermco Poly2 *up* ** ** ** **
Thermco Nitride1 *down* *pump cannot maintain pressure-newpump this
week* ** ** **
Thermco bpsg *up* ** ** ** **
AMAT Epi Cham. A *yellow* *O2 in SiH4?,no GeH4* ** ** **
AMAT Epi Cham. B *down* ***At the county* ** ** **
TEL Spa *up* ** ** ** **
Burn Box *up* ** ** ** **
SEM 4160 *up* ** ** ** **
FGA2 *up* ** ** ** **
SiH4 for furnaces *on* *crossover ok* ***changeover working
well*** ** **
Good Morning All,
1. New issues: No GerH4 on EPi-should be here Thursday
2. Ongoing issues:Tylan Poly rewriting recipes,
Tylannitride tested again waiting further instructions after
alarms, working on Badger interlocks,
,particles on back
of Epi wafers,
O2 in Silane? ,
:Thermco nitride
shutdown can't pump pump here end of week,
POCl3 smells
3. Resolved :
Thermco Poly2engaged clutch,Replaced
FGA cylinders, Reset Tylan 1 no overtemp, ,Thermco 1 low
growth-ran a test run all flows and temps normal,Epi adjusted
hot idle power
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Date: |
11/12/12 |
THICKNESS-Change
at |
|
Priority |
| Tube Name/Number |
Status |
|
|
|
|
| Tylan 1 |
up |
|
|
|
|
| Tylan 2 |
yellow |
needs test |
|
|
|
| Tylan 3 |
up |
|
|
|
|
| Tylan 4 |
up |
|
|
|
|
| Tylan 5-BBr3 |
up |
|
|
|
|
| Tylan 6-POCl3 |
yellow |
chlorine smells |
|
|
|
| Tylan 7-TEOS2 |
up |
|
14.39/30 |
|
|
| Tylan 8-SiGe |
down |
waiting for users |
3.4/30 |
|
|
| Tylan 9-Poly |
down |
rewriting
recipes-testing revised recipes |
23.7/30 |
|
|
| Tylan 10-Nitride |
down |
tested after sih4
alarm,testing more |
28.5/30 |
|
|
| Tylan 11-LTO |
yellow |
|
4.3/30 |
|
|
| Tylan 12-FGA |
up |
|
|
|
|
| Thermco 1 |
yellow |
trial run looked
OK |
|
|
|
| Thermco 2 |
up |
|
|
|
|
| Thermco 3 |
up |
|
|
|
|
| Thermco4 |
up |
|
|
|
|
| Thermco Poly1 |
up |
|
|
|
|
| Thermco Poly2 |
up |
|
|
|
|
| Thermco Nitride1 |
down |
pump cannot
maintain pressure-newpump this week |
|
|
|
| Thermco bpsg |
up |
|
|
|
|
| AMAT Epi
Cham. A |
yellow |
O2 in SiH4?,no
GeH4 |
|
|
|
| AMAT Epi
Cham. B |
down |
At the county |
|
|
|
| TEL Spa |
up |
|
|
|
|
| Burn Box |
up |
|
|
|
|
| SEM 4160 |
up |
|
|
|
|
| FGA2 |
up |
|
|
|
|
| SiH4 for furnaces |
on |
crossover
ok |
changeover
working well |
|
|