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By: Arash Hazeghi
June 2005
Raith free
Reservation removed
July 2005
Reservation removed
October 2006
done, RAITH free for next user
May 2007
will start late
Raith free for next user
Released Mondat 5/14
March 2008
Problem with PMMA exposure/lift off
RAITH reservation swap
April 2008
Re: raith free tomorrow 10:30-1pm
RAITH available now
Beam blanker switch
Lift off
May 2008
Problem with RAITH computer
Re: Problem with RAITH computer
Re: new Thread: My contamination dots appear as strange single pixel lines and why.
RAITH available now
RAITH available tomorrow 11:30-13:00PM
June 2008
New offline computer
not using my 1hr session
RAITH available for next user
Re: Raith free 16:00pm-18:00pm Saturday
July 2008
Problem with RAITH PC
Re: Raith free tonight from 10pm to 2am
which metal for lift off
Fatal error during unload
Fixed
RAITH available for next user
Best dose for dots and 2% resist
August 2008
RAITH offline PC fixed
September 2008
Reservation removed 17:30-21:30
October 2008
Re: Raith free 16:00-18:30
ZEP bottle is empty
November 2008
Re: raith free 21:00
Re: raith problems
Ma-N 2403 negative Ebeam resist and YES oven
December 2008
Re: RAITH system coming back up. Hand off to Kocabas or next Userabout8 - 9 PM
January 2009
RAITH available from 1:30AM
RAITH available for next user
RAITH free 2-3PM
February 2009
RAITH available
Raith time tomorrow (Thur.) 20:00-22:30pm free
raith free tomorrow from 2-6pm
RAITH available 6-8:30PM
March 2009
JWC is finished earlier than was expected the system is available for next user or anyone wishing to come onto the system.
raith free until 11 pm
RAITH available tonight from 9:30 to midnight
Liftoff recipe for maN2403
raith free now to 8pm
reservation taken
April 2009
System released 11:00PM-12:00AM
Power glitch
5:30-6:30 released
raith free noon-1 pm today
May 2009
raith free 10 pm-2a.m. tonight
Odor in Ebeam room
Raith free tomorrow 9 to 12
June 2009
Will start at 6PM
Strong odor in the Ebeam lab
RAITH available for next user
July 2009
Re: Raith free tomorrow 3:30pm~7:30pm
Reservation deleted from 12-13
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