By: Arash Hazeghi

June 2005

• Raith free
• Reservation removed

July 2005

• Reservation removed

October 2006

• done, RAITH free for next user

May 2007

• will start late
• Raith free for next user
• Released Mondat 5/14

March 2008

• Problem with PMMA exposure/lift off
• RAITH reservation swap

April 2008

• Re: raith free tomorrow 10:30-1pm
• RAITH available now
• Beam blanker switch
• Lift off

May 2008

• Problem with RAITH computer
• Re: Problem with RAITH computer
• Re: new Thread: My contamination dots appear as strange single pixel lines and why.
• RAITH available now
• RAITH available tomorrow 11:30-13:00PM

June 2008

• New offline computer
• not using my 1hr session
• RAITH available for next user
• Re: Raith free 16:00pm-18:00pm Saturday

July 2008

• Problem with RAITH PC
• Re: Raith free tonight from 10pm to 2am
• which metal for lift off
• Fatal error during unload
• Fixed
• RAITH available for next user
• Best dose for dots and 2% resist

August 2008

• RAITH offline PC fixed

September 2008

• Reservation removed 17:30-21:30

October 2008

• Re: Raith free 16:00-18:30
• ZEP bottle is empty

November 2008

• Re: raith free 21:00
• Re: raith problems
• Ma-N 2403 negative Ebeam resist and YES oven

December 2008

• Re: RAITH system coming back up. Hand off to Kocabas or next Userabout8 - 9 PM

January 2009

• RAITH available from 1:30AM
• RAITH available for next user
• RAITH free 2-3PM

February 2009

• RAITH available
• Raith time tomorrow (Thur.) 20:00-22:30pm free
• raith free tomorrow from 2-6pm
• RAITH available 6-8:30PM

March 2009

• JWC is finished earlier than was expected the system is available for next user or anyone wishing to come onto the system.
• raith free until 11 pm
• RAITH available tonight from 9:30 to midnight
• Liftoff recipe for maN2403
• raith free now to 8pm
• reservation taken

April 2009

• System released 11:00PM-12:00AM
• Power glitch
• 5:30-6:30 released
• raith free noon-1 pm today

May 2009

• raith free 10 pm-2a.m. tonight
• Odor in Ebeam room
• Raith free tomorrow 9 to 12

June 2009

• Will start at 6PM
• Strong odor in the Ebeam lab
• RAITH available for next user

July 2009

• Re: Raith free tomorrow 3:30pm~7:30pm
• Reservation deleted from 12-13

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