Messages 6xx
00:
RAITH is checking out OK. SEE THE NOTES...
(
James Conway)
01:
Reservation cancelled, 3-9-4 9:00-5:00
(
Edo Waks)
02:
Yellow light for <30kV?
(
John Cumings)
03:
Re: Yellow light for <30kV?
(
Lindsay Moore)
04:
Re: Charging in the blanking aperture causing problems some users have seen...
(
James Conway)
05:
Re: Raith pattern generator Problem again?
(
Charis Quay Huei Li)
06:
Raith is down. Back up late thursday at the earliest...
(
James Conway)
07:
Re: Comment ebeam 2003-11-20 16:48:34: Report etch rate ZEP520]
(
James Conway)
08:
RAITH SHUTDOWN for the weekend. RAITH Field service has been requested.
(
James Conway)
09:
Reservation Cancelled from 21:00pm-5:00am
(
Hatice Altug)
10:
Reminder and Agenda EBEAM TOWN MEETING TODAY CIS 101 2 - 4 PM.
(
James Conway)
11:
RAITH DOWN FOR USER OVERNIGHT -- BAKING OUT ONE MORE TIME.
(
James Conway)
12:
Raith Status 16 March 2004:2209 hrs :: Yellow Status-- test mode pending full qualification WED AM.
(
James Conway)
13:
Raith is being qualified -- last nights users had good results...
(
James Conway)
14:
Please send me your best images and a slide or two on your project results.
(
James Conway)
15:
Re: Raith is being qualified -- last nights users had good results...
(
John Cumings)
16:
Re: Raith is being qualified -- last nights users had good results...
(
Luigi Scaccabarozzi)
17:
Raith: 5:30-8 pm tonight open
(
Mark Topinka)
18:
Re: Raith is being qualified... Thread: Required Limits of keV operation through 6APRIL2004 on RAITH 150
(
James Conway)
19:
Important: High voltage clarification
(
David Goldhaber-Gordon)
20:
RAITH Is UP and working optimally. Green Light is on.
(
James Conway)
21:
Re: Important: High voltage clarification
(
Ji-Won Son)
22:
Re: IMPORTANT : High voltage clarification
(
James Conway)
23:
Re: Important: High voltage clarification
(
James Conway)
24:
Thread: OPerations at 30 kV? Not until 2nd week of April and after more test are conducted.
(
James Conway)
25:
Re: Yellow light for <30kV? NOT -- RED LIGHT FOR 20 kV and above 21 until further notice.
(
James Conway)
26:
last call for submissions for the dortmund presentations.
(
James Conway)
27:
res removed sunday eve.
(
Dan Grupp)
28:
reservation removed mid-night - 4 am
(
Ali Javey)
29:
loadlock...
(
Charis Quay Huei Li)
30:
Re: loadlock...
(
Hendrik Bluhm)
31:
Re: loadlock...
(
Charis Quay Huei Li)
32:
50nm features
(
Lindsay Moore)
33:
Can any of the Raith champions restore Raith?
(
Peter Catrysse)
34:
Raith Status?
(
Ji-Won Son)
35:
Loadlock error follow up
(
Mary Tang)
36:
Correction...
(
Mary Tang)
37:
Raith: done 1 hr early
(
Dan Grupp)
38:
Raith free Wed 19:30-5am
(
Onur KILIC)
39:
RAITH QUESTION - LEO
(
Dong-Woon Shin)
40:
res cancelled thu morning
(
Charis Quay Huei Li)
41:
raith down, very sorry
(
Charis Quay Huei Li)
42:
raith up, thanks to arvind...
(
Charis Quay Huei Li)
43:
11pm cancelled: sample has problem
(
Mehmet Fatih Yanik)
44:
Raith free from 5:30 to 9 pm
(
Ji-Won Son)
45:
Raith reservation cancelled
(
Hemanth Jagannathan)
46:
Raith: black dots on holder
(
Dan Grupp)
47:
11:00pm reservation cancelled (tonight)
(
Hatice Altug)
48:
aperture align problems
(
Kai-Mei Camilla Fu)
49:
will finish early 9:00 pm.
(
Kai-Mei Camilla Fu)
50:
Re: aperture align problems
(
Charis Quay Huei Li)
51:
Re: aperture align problems
(
John Cumings)
52:
reservation 10pm tonight deleted
(
Charis Quay Huei Li)
53:
Digital Pattern Generator Problem
(
Hatice Altug)
54:
Re: Digital Pattern Generator Problem
(
Hendrik Bluhm)
55:
Canceling Monday morning session
(
Peter B. Catrysse)
56:
Re: Canceling Monday morning session
(
Hung-Tao Chou)
57:
Raith up
(
Dan Grupp)
58:
Raith seems ok
(
John Cumings)
59:
res removed wed night
(
Luigi Scaccabarozzi)
60:
res tues eve deleted
(
Charis Quay Huei Li)
61:
Need access to the RAITH system Thursday afternoon after 3 PM...
(
James Conway)
62:
Re: Need access to the RAITH system Thursday afternoon after 3 PM...
(
Dong-Woon Shin)
63:
Res Canceled, 1:30 pm-4:30 pm
(
Dong-Woon Shin)
64:
Raith is down until further notice. Problem: several nested interface problems to be resolved...
(
James Conway)
65:
Raith free tomorrow night
(
Hendrik Bluhm)
66:
Raith down through Tuesday ...
(
James Conway)
67:
Raith Status 2004-04-09 17:28:45: intermittant IEE-488 communications continue but have a workaround.
(
James Conway)
68:
time available - 4/12 15:00-19:00
(
John Cumings)
69:
raith free until wed 7am
(
Luigi Scaccabarozzi)
70:
reservation 5:30pm cancelled
(
Charis Quay Huei Li)
71:
res canceled, Friday 1:30 pm to 5:30 pm
(
Dong-Woon Shin)
72:
Raith free from 10pm Fri.
(
Ji-Won Son)
73:
reserv free tomorrow 5:30-10:30
(
Kai-Mei Camilla Fu)
74:
RAITH UPDATE: No restrictions on Acceleration Voltage settings, can now run 0.3 to 30 kV.
(
James Conway)
75:
Wtecking equipment-READ THIS
(
Charley)
76:
raith free now.
(
Lindsay Moore)
77:
Raith: please don't use 15-20.9KV or 23-30KV
(
Mark Topinka)
78:
Re: Raith: please don't use 15-20.9KV or 23-30KV
(
Ji-Won Son)
79:
WE are returning to Restrictions on Acceleration Voltage settings 0.3 to 19.9 keV until further notice.
(
James Conway)
80:
Re: Raith: please don't use 15-20.9KV or 23-30KV
(
James Conway)
81:
reservatino tonight cancelled
(
Charis Quay Huei Li)
82:
Cancelled Raith Reservation Tonight
(
arvind sundaramurthy)
83:
Re: PMMA 495K needs refill
(
James Conway)
84:
Update to Thread: EHT TRIPS, Please stay below 18 keV until further notice
(
James Conway)
85:
Raith Time cancelled 17:00 to 19:30
(
John Cumings)
86:
done early
(
Silvia Luescher)
87:
will start from 12:00 pm
(
Dong-Woon Shin)
88:
load lock error...
(
Dong-Woon Shin)
89:
Load lock error cleared. Pumping correctly so far
(
Dong-Woon Shin)
90:
Reservation cancelled 18:00-22:30pm today
(
Hatice Altug)
91:
Please check your coral reservations to ensure you are below reservations limits.
(
James Conway)
92:
ALERT: Prepare for maintenance and system down time next week. Maximize your throughput this week.
(
James Conway)
93:
Raith free today from 7:30pm to 11:30pm
(
Hemanth Jagannathan)
94:
ANNOUNCEMENT: Next EBEAM TOWN HALL MEETING MONDAY MAY 3, 2004 2 - 4 PM
(
James Conway)
95:
ANSI text format for RAITH GDS Pattern Generation
(
James Conway)
96:
Might like to make adjustments to systemthis afternoon, TBD
(
James Conway)
97:
time is free from 4-8pm Re: Might like to make adjustments to systemthis afternoon, TBD
(
Hung-Tao Chou)
98:
Stopped your run so we can make adjustments to LEO.
(
James Conway)
99:
thursday 6am removed
(
Charis Quay Huei Li)