Subject: Re: short questions on exposures
From: "James W. Conway" <>
Date: Mon, 07 May 2012 12:35:20 -0700

1. 10 kV 60 um Aperture is about 1 nA.  Increases slightly as you come 
up in Acceleration voltage too.  Steps increase too but so does speed.  
See me for more details from my notes on writing large area gratings...

2. If you insert the exposure parameters it will calculate the times well.

3. Just worry about the U-V.

Good Questions,


On 5/7/2012 12:20 PM, Sochnikov Ilya wrote:
> Hi James,
> Few short questions:
> 1) What is the current when using 60um aperture @ 10, 20&  30 KeV?
> 2) Can I use the software on the side computer (the one used for
> drawings only) to estimate exposure time? Does it give a correct
> estimation?
> 3) When drawing patterns on that computer should I care much about X Y
> values? Should I care mainly about u, v to be where I want it to be ?
> Thanks,
> ilya