Subject: Re: Raith not working - beam blanking problem
From: Ali Javey <>
Date: Wed, 30 Jun 2004 17:18:23 -0700 (PDT)

I did a write last night.  The results came out pretty good. Didn't see
any problems.  I wrote over a 12x4 mm area with all sorts of
features/feature sizes.


On Wed, 30 Jun 2004, Kenneth Brian Crozier wrote:

> Hi everyone,
> James and I noticed that the specimen current was much higher than normal
> with the beam blanked by the Raith (1400 fA).  This could be the cause of
> the "splotch" problem reported earlier and detailed on the Raith swiki at:
>  Over a long exposure (e.g. the
> photonic crystal pattern shown takes about 90 min) this could lead to the
> large "splotch" being exposed when the beam is meant to be blanked.
> It'd be great if anyone who has experienced similar problems could let both
> James and I know about it.
> thanks,
> Ken
> ---------------------------------------------
> Ken Crozier, Ph.D.
> room GL 51, Ginzton Laboratory,
> Stanford University, Stanford, CA 94305, USA
> tel : 650-723-1945  fax : 650-725-2533