Subject: flavours of negative ebeam resist
From: Gaurav Thareja <>
Date: Tue, 27 Mar 2007 15:07:58 -0700

hi raith users

I was keen to know the type of negative ebeam resists we use in the lab. I
am interested in a resist with nice etch selectivity to Silicon
(P5000/lampoly etch) and vertical side walls.

Any quantitative data on the etch selectivity to Silicon would also be


Gaurav Thareja
Graduate Student
Solid State Electronics
Electrical Engineering
Stanford University
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