Subject: Raith Holiday Shutdown Schedule and Maintenance Plan
From: James Conway <jwc@snf.stanford.edu>
Date: Tue, 11 Dec 2007 11:54:56 -0800
*RIE polymeric micro-pillar formation during RIE etch...
Greetings Raith User Community:*
We will be starting our Holiday shutdown and annual RAITH Preventative
Maintenance activities 7 AM Wednesday December 19th, no student access
to the cleanroom or the Ebeam Lab after this time.
*1. Action required by Friday December 14, 2007: Users are reminded to
clean out all of their samples from the Ebeam Lab Pass Through by the
end of the Day Friday December 14, 2007:*
All materials left in the dry box after Tuesday December 18th will be
discarded and/or considered donations to the Lab. I am happily
accepting donations of quality Quartz, SOI, and GaAs substrates
preferably sized to 100 mm wafers. Please also take a minute to assist
us to clean up the Ebeam Lab by removing all extra engineering materials
and wiping down the equipment. Just five minutes of help from each of
you is all I ask...
*2. Action required by Tuesday December 18, 2007: All Users should
back up their project, GDSII pattern and position list files to another
host or medium as a precaution before the RAITH visit. I will have
backed up the entire file system for the RAITH and LEO computers by the
end of this week, but you should NOT depend on my backups to secure your
work!*
*
Wednesday December 19, 2007:*
* *Notice: All Ebeam Lab users should be out of the lab and
cleanroom at 7 AM!*
* RAITH USA Field Service Manager Cole Loomis will arrive to perform
the complete Annual Preventive Service routine including a
complete SEM column clean with FE-GUN and aperture replacements.
In addition we will address several outstanding service and
maintenance issues related to the Cooling Water loop, replace the
main chamber turbo pump with a new turbo pump, and check out the
leveling on all the sample fixtures. We will then complete the PM
by starting a 200 hour bake out of the column. We performed a
similar extended bake out last year which resulted in optimal Gun
section vacuum levels and provided us with a clean environment for
the Gun to operate. Through the last year we have not had any
downtime related to the FE-Gun and EHT power supplies and vacuum
has been maintained in the upper to middle -010 Torr range.
*Friday January 4th, 2008:*
* RAITH USA Field Service arrives and brings up the FE-Gun and RAITH
150 Platform and performs mechanical test of the Load Lock
transfer arm and electrical test on the system.
24 hours of FE-Gun operation are required before checking and
final adjustments can be performed.
* After 24 hours or more of Beam Time: All normal SEM E/O card
adjustments including Field Orthogonality and magnification range
and stigmation amplifier centering functions check and alignments.
The second Days adjustments may be deferred to the following Monday...
*
Monday January 7th, 2007:*
* 10 - 11 AM Raith performs final system adjustments as required.
* 11 AM - 6 PM James W. Conway performs the RAITH Qualification and
PCM test procedures following the template in RAITH Notebook NO.
Two, including factory acceptance testing for maximum SEM Imaging
Resolution and test Write Field to Write Field and Overlay Layer
One to Layer Two Stitching test on 100 nm PMMA reference films on
Silicon.
* 6 PM to 6 AM January 8th, 2007 Raith Operations restricted to
RAITH Champions only. Users test the system and report any noted
changes or problems encountered.
*Tuesday January 8th, 2007:
*
* 6 AM to 10 AM: The system will be available for all Users at
all levels of skill resuming the Coral reservation schedule.
* Users seeking specific application support and training
assistance during the first week of operations should schedule
these sessions with James Conway before the December Shutdown.
This plan is much the same plans as in years past and some flexibility
in the schedule will be required to adapt to changing circumstances as
they arise.
Hoping everyone will have a Safe and Joyous Holiday Season!
Thank you all for your continuing support through the last year!
James Conway
Ebeam Lab SNF
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Greetings Raith User Community:
We will be starting our Holiday shutdown and annual RAITH Preventative Maintenance activities 7 AM Wednesday December 19th, no student access to the cleanroom or the Ebeam Lab after this time.
1. Action required by Friday December 14, 2007: Users are reminded to clean out all of their samples from the Ebeam Lab Pass Through by the end of the Day Friday December 14, 2007:
All materials left in the dry box after Tuesday December 18th will be discarded and/or considered donations to the Lab. I am happily accepting donations of quality Quartz, SOI, and GaAs substrates preferably sized to 100 mm wafers. Please also take a minute to assist us to clean up the Ebeam Lab by removing all extra engineering materials and wiping down the equipment. Just five minutes of help from each of you is all I ask...
2. Action required by Tuesday December 18, 2007: All Users should back up their project, GDSII pattern and position list files to another host or medium as a precaution before the RAITH visit. I will have backed up the entire file system for the RAITH and LEO computers by the end of this week, but you should NOT depend on my backups to secure your work!
Wednesday December 19, 2007:
- Notice:
All Ebeam Lab users should be out of the lab and cleanroom at 7 AM!
- RAITH USA Field
Service Manager Cole Loomis will arrive to perform the complete Annual
Preventive Service routine including a complete SEM column clean with
FE-GUN and aperture replacements.
In addition we will address several outstanding service and maintenance issues related to the Cooling Water loop, replace the main chamber turbo pump with a new turbo pump, and check out the leveling on all the sample fixtures. We will then complete the PM by starting a 200 hour bake out of the column. We performed a similar extended bake out last year which resulted in optimal Gun section vacuum levels and provided us with a clean environment for the Gun to operate. Through the last year we have not had any downtime related to the FE-Gun and EHT power supplies and vacuum has been maintained in the upper to middle -010 Torr range.
- RAITH USA Field
Service arrives and brings up the FE-Gun and RAITH 150 Platform and
performs mechanical test of the Load Lock transfer arm and electrical
test on the system.
24 hours of FE-Gun operation are required before checking and final adjustments can be performed.
- After 24 hours or more of Beam Time: All normal SEM E/O card
adjustments including Field Orthogonality and magnification range and
stigmation amplifier centering functions check and alignments.
The second Days adjustments may be deferred to the following Monday...
Monday January 7th, 2007:
- 10 - 11 AM Raith performs final system adjustments as required.
- 11 AM - 6 PM James W. Conway performs the RAITH Qualification and PCM test procedures following the template in RAITH Notebook NO. Two, including factory acceptance testing for maximum SEM Imaging Resolution and test Write Field to Write Field and Overlay Layer One to Layer Two Stitching test on 100 nm PMMA reference films on Silicon.
- 6 PM to 6 AM January 8th, 2007 Raith Operations restricted to RAITH Champions only. Users test the system and report any noted changes or problems encountered.
- 6 AM to 10 AM: The system will be available for all Users at
all levels of
skill resuming the Coral reservation schedule.
- Users seeking specific application support and training assistance during the first week of operations should schedule these sessions with James Conway before the December Shutdown.
This plan is much the same plans as in years past and some flexibility in the schedule will be required to adapt to changing circumstances as they arise.
Hoping everyone will have a Safe and Joyous Holiday Season!
Thank you all for your continuing support through the last year!
James Conway
Ebeam Lab SNF
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