Subject: Beamtools report for Monday May 5, 2003 at Noon
From: James Conway <>
Date: Mon, 05 May 2003 12:03:12 -0700


All Ebeam and SEM systems are up and available for users:

Semhitachi, S-800 FE-SEM is up.
Please don't initially flash the tip when coming onto the system. Only flash after you see emission current instability. The new SOP procedure is in effect, all users should be following this procedure. A copy is in the SEM LAB.

Ebeam, H-700 Ebeam Exposure System is coming back up and will be available to users this afternoon.  Please report the minimum features you can resolve in your writes.

S-4160 is up and ready for your use.

RAITH 150 SYSTEM IS UP and available for users!
Problems reported over this weekend have been resolved by a hardware reset.
No other problems were found and the system was fully tested this morning.

Please be sure to keep your reservations under limits established.
We have a number of new users coming onto the system.  Let share the tool and work together to maximize throughput on the system this week.
The system schedule is nearly full, see James Conway if you are having problems making a reservation on CORAL.

Thank you for your interest in E-beam Lithography and SEM at SNF!

James Conway || Paul Jerabek || Charley Williams III
E-beam Technology Group, Stanford Nanofabrication Facility