Subject: 50nm features
From: Lindsay Moore <>
Date: Sun, 21 Mar 2004 17:51:01 -0800

Hi.  Has anyone gotten 50nm features using 10kV acc voltage?  I am trying 
to do this now, but have been unsuccessful.  If you have achieved this 
could you please tell me what parameters you used?  (aperture, write field 
size, dose, area step size or line step size, etc...)
thank you!