Subject: Comment raith SNF 2006-01-25 16:30:17: Electrostatic Chuck and Piezo post controls calibrated
From: James Conway <>
Date: Fri, 27 Jan 2006 09:22:14 -0800


The ESChuck and the piezo post positions used for leveling routines have 
been recalibrated and updated calibrations saved onto the system 
defaults.  Further testing on wafers on the Std. Sample Holder will be 
tested tomorrow.  Users may notice a change to the center piezo 
positions with no concerns. If you do not see the piezo post move into 
the centered positions after loading your samples please see James 
Conway, or refer to the RAITH Notebook NO. 3 and move the piezo heights 
to these positions and save your project.

On the centered Piezo positions a 100 mm wafer correctly placed flat on 
the Std. Sample holder is level to within a delta WD of 0.014 mm.

Please let me know if you have any questions.

James Conway