Subject: need help on ebeam liftoff
From: cshen@briontech.com
Date: Sun, 29 Jun 2003 18:36:15 -0700 (PDT)


Has anybody worked on double layer PMMA liftoff process? If so, can I ask
you a few questions?I wish to know your recipe and the capability of the process. Is
130nm
features achievable with good uniformity?Thanks a lot.
Chongfei