Subject: Bilayer PMMA Resist Process for Liffoff
From: Li Gao <>
Date: Mon, 3 Oct 2005 11:17:33 -0700

Good morning:

Does anyboday has the bi-layer PMMA recipe for metal liftoff? I found one
one the SNF website, but is seems very old.


Best regards, Li

Li Gao
Dept.of Applied Physics
Stanford University
Tel: (408) 927-2920