Hi All, I tried to use Raith now, but circumstance is still strange from normal. On Load lock window, "unload samples" tag is turned on,and "load samples" tag is turned off. So I cannot start loading sample. Since I'm not experienced user, I shouldn't try to solve by myself. So I gave up using and left without any trial. If someone knows how to solve it, please give suggestion. Best- Makoto > Wow! Congratulations and THANKS!!! > > Mary > > Xinran Wang wrote: >> Hi All, >> Good news, raith is back up! >> I just worked with Cole from Raith USA to recover the system. We >> manually moved the robot arm out and moved the stage to the >> exchange position, and was able to unload the sample holder to >> loadlock. Right now the sample holder is in loadlock. The gun >> vacuum is higher than normal value( 2.7E-9mBar, probably because of >> poor chamber vacuum in the last few days), so Cole recommended we >> operate under low voltage. Since James is not here, I want to be >> cautious and ask all users to operate below 10KeV . The gun vacuum >> should be going down gradually. >> All raith users please carefully monitor the system during your >> session and inspect your wafer and report and problem to >> raith.stanford.edu <http://raith.stanford.edu>. James will not be >> here until next week, so let's try to make raith work normally >> during this time. >> Thank you. >> Xinran >> >> On 7/5/07, *Mary Tang* <mtang@stanford.edu >> <mailto:mtang@stanford.edu>> wrote: >> >> Hi all -- >> >> Cole Loomis just called. Pretty much as James says, he would like >> to be >> able to walk through the system with one of the Champions to >> confirm a >> hardware problem before committing to sending a field service engineer >> out. It's three hours ahead there -- is anyone available early this >> afternoon? If so, please call Raith at: 631-738-9500 -- and you >> might >> want to drop an email to him at cl@raithusa.com >> <mailto:cl@raithusa.com> (and please cc everyone >> else in the loop.) If not today, he's expecting someone to call >> tomorrow. I'm leaving the machine enabled in my name for now, >> just in case. >> >> Thanks! >> >> Mary >> >> Xinran Wang wrote: >> > Hi Raith users, Mary, >> > >> > This afternoon I called James and was instructed by him over the >> phone >> > to try to solve the raith problem. We were able to pump down the >> > loadlock and chamber to performe load procedure. But >> unfortunately the >> > robot arm is now stuck in the chamber and is unable to move. It's >> > probably stuck with the sample holder that was inside the chamber. >> > >> > At this moment, raith is still down until further notice, James will >> > contact Raith first thing tomorrow to ask them send some people >> here. >> > >> > Best, >> > Xinran >> > >> > >> > On 7/4/07, *Mary Tang* < mtang@stanford.edu >> <mailto:mtang@stanford.edu> >> > <mailto:mtang@stanford.edu <mailto:mtang@stanford.edu>>> wrote: >> > >> > Hi Andrei, et al -- >> > >> > Thanks. James also contacted me this morning and says that >> he can >> > walk >> > the next user through the reset, over the phone. I've >> cleared the >> > shutdown so that the next user can do this. >> > >> > Mary >> > >> > Andrei Faraon wrote: >> > >> > > I will not be on campus on Thursday morning. Also Ilya Fushman >> > in out >> > > of town. >> > > >> > > In case someone else wants to fix the Raith on Thursday >> morning >> > then >> > > you must remember that I unplugged two hoses from the load >> lock >> > valve >> > > controller on the back of the electronics rack that >> controlls the >> > > Raith (third module from bottom). I unplugged the hose >> labeled P >> > and >> > > the one labeled Close (I hope I remember correctly) and I >> connected >> > > them together. This way I closed the load lock valve manually. >> > > >> > > The robot arm is in the loadlock and the loadlock is >> vented. The >> > chuck >> > > (metal plate where we put the wafers) is inside the main Raith >> > > chamber. >> > > >> > > I should have cell phone contact on Thursday morning so >> please >> > call me >> > > if you need other information. >> > > >> > > I should be on campus on Thursday afternoon and also all >> day on >> > > Friday, and I can try to bring the tool up in case it will >> not be >> > > fixed on Thursday morning. >> > > >> > > Regards, >> > > >> > > Andrei >> > > >> > > >> > > >> > > On 7/3/07, Mary Tang < mtang@stanford.edu >> <mailto:mtang@stanford.edu> >> > <mailto:mtang@stanford.edu <mailto:mtang@stanford.edu>>> wrote: >> > > >> > >> Thanks Andrei -- >> > >> >> > >> I just also spoke with Cole, who says that he is also >> reluctant >> > to give >> > >> out the service password. I suggest that unless James calls >> > back that >> > >> we go with the plan to call up Joe Klingfus on >> Thursday. Are >> > you or >> > >> some other Raith Champion available? >> > >> >> > >> Mary >> > >> >> > >> Andrei Faraon wrote: >> > >> > Hi Mary, >> > >> > >> > >> > I called Main Raith USA line (631) 738-9500 and I spoke on >> > the phone >> > >> > with Joel. He guided me through the procedure to bring the >> > robot arm >> > >> > back in the loadlock and close the loadlock valve. I had to >> > close the >> > >> > valve manually by connecting two hoses from the back of >> the Raith >> > >> > control rack (now they are still connected). >> > >> > >> > >> > Joel gave me his cell phone (850 445 6140) so we can >> call him >> > once we >> > >> > get acess to an administrator account. >> > >> > >> > >> > I am still waiting for James to call me back. >> > >> > >> > >> > >> > >> > Andrei >> > >> > >> > >> > >> > >> > >> > >> > On 7/3/07, Mary Tang <mtang@stanford.edu >> <mailto:mtang@stanford.edu> >> > <mailto:mtang@stanford.edu <mailto:mtang@stanford.edu>>> wrote: >> > >> >> Hi everyone -- >> > >> >> >> > >> >> I just spoke with Joe Klingfus, the Raith USA field >> service guy. >> > >> He is >> > >> >> very, very reluctant to give us the Raith administrative >> > password >> > >> >> (understandably.) I am not sure who Andrei spoke with >> (Cole >> > Loomis?) >> > >> >> but Joe was unable to get in touch with the NY office >> to ask >> > about >> > >> the >> > >> >> situation. So, here's the deal. Joe will be available on >> > >> Thursday, at >> > >> >> 10 am our time, to discuss the situation and walk us >> through any >> > >> >> procedures and, if necessary, provide us with the >> Raith service >> > >> password >> > >> >> to get things going. Joe will get in touch with the NY >> > office to >> > >> find >> > >> >> out exactly what they did with Andrei. >> > >> >> >> > >> >> So, are there any Raith champions willing and >> available to talk >> > >> with Joe >> > >> >> at 10 am Thursday? Many apologies for the delay, but as >> > Raith is >> > >> on the >> > >> >> East Coast, they've all left for the holiday... >> > >> >> >> > >> >> In the meantime, I've left the system in shutdown/red, >> just to >> > >> make sure >> > >> >> it's safe. If one of the Raith Champions needs it >> taken out of >> > >> shutdown >> > >> >> before Thursday, send me an email or give me a call at >> home >> > -- my >> > >> number >> > >> >> is on any of the bright pink Emergency sheets posted >> around >> > the lab. >> > >> >> >> > >> >> Mary >> > >> >> >> > >> >> -- >> > >> >> Mary X. Tang, Ph.D. >> > >> >> Stanford Nanofabrication Facility >> > >> >> CIS Room 136, Mail Code 4070 >> > >> >> Stanford, CA 94305 >> > >> >> (650)723-9980 >> > >> >> mtang@stanford.edu <mailto:mtang@stanford.edu> >> <mailto:mtang@stanford.edu <mailto:mtang@stanford.edu>> >> > >> >> http://snf.stanford.edu >> > >> >> >> > >> >> >> > >> >> >> > >> > >> > >> > >> > >> >> > >> >> > >> -- >> > >> Mary X. Tang, Ph.D. >> > >> Stanford Nanofabrication Facility >> > >> CIS Room 136, Mail Code 4070 >> > >> Stanford, CA 94305 >> > >> (650)723-9980 >> > >> mtang@stanford.edu <mailto:mtang@stanford.edu> <mailto: >> mtang@stanford.edu <mailto:mtang@stanford.edu>> >> > >> http://snf.stanford.edu >> > >> >> > >> >> > >> >> > > >> > > >> > >> > >> >> >> -- >> Mary X. Tang, Ph.D. >> Stanford Nanofabrication Facility >> CIS Room 136, Mail Code 4070 >> Stanford, CA 94305 >> (650)723-9980 >> mtang@stanford.edu <mailto:mtang@stanford.edu> >> http://snf.stanford.edu >> >> >> > > > -- > Mary X. Tang, Ph.D. > Stanford Nanofabrication Facility > CIS Room 136, Mail Code 4070 > Stanford, CA 94305 > (650)723-9980 > mtang@stanford.edu > http://snf.stanford.edu *************************************************** Makoto Koto Visiting Scholar 476 Lomita Mall 244 McCullough Building Stanford, CA 94305-4045 ***************************************************