Subject: Dosing PMMA on a Cr layer
From: Morgan Douglas Mager <>
Date: Thu, 17 Feb 2005 11:06:09 -0800

Does anyone have experience writing with 2% PMMA over Cr? If so, what kind
of exposure/development did you use? I would think that since it is a
metallic layer, it doesn't matter what is below the Cr (Si/SiO2/etc). Does
anyone know for sure if that is correct? Any information on spin
speeds/thickness would be useful as well. Thanks.