Subject: Re: Problem raith SNF 2008-06-03 17:36:17: lots of stage drift 6-2
From: "Kathryn Todd" <>
Date: Tue, 3 Jun 2008 19:06:14 -0700

I didn't try the exposure, because the drift seemed so bad. This
sample isn't different from the other samples I write, which don't
generally have this drifting issue, so maybe it was a bad landing.
There was (I believe) an incorrect (not zero) signal from the faraday
cup on the sample holder too--I don't know if you expect this, or if
it would go along with a bad landing.


On Tue, Jun 3, 2008 at 6:46 PM, James Conway <> wrote:
> Hello Kathryn and Raith Users:
> Thank you for your report!
> I checked the LIS stage today and did not measure any significant drift or
> shifting of either the image or the stage SEMing an SOI chip covered with
> Espacer.
> The sample holder may have had a bad landing due to existing issues with the
> T loader transfer arm, or your sample could have been charging.
> How did the EBL exposure come out?
> wrote:
> Image was drifting ~.25 microns/sec Monday night after manual load
> procedure.