Subject: Any results on Raith?
From: Onur Kilic <okilic@stanford.edu>
Date: Thu, 21 Nov 2002 17:29:06 -0800 (PST)


Yesterday night, I tried a dose test on Raith. I wrote an array of 10
samples with doses varying from 50uC to 320uC. To my surprise, after
developing I did not get any structures at all. I just could see the area
that I used for writefield alignment, and the one for focusing etc., but
no real structures.
Does anyone had any succesful writes, or any structures recently? I try to
find out if there was a problem with the PMMA or anything else.
Cheers,

ONUR KILIC

Graduate Student
Applied Physics
Stanford University

Tel: (650) 498 1371
Address: 750 Escondido Rd 138-B Stanford, CA 94305
Web: www.stanford.edu/~okilic