Subject: Etching EBL patterns with STSetch
From: Goeckeritz Jeremy <>
Date: Fri, 12 Dec 2008 16:36:33 -0800 (PST)


I'm trying to etch Silicon gratings about 250 nm wide several microns deep using a ZEP
resist mask.  Does anyone have experience in this area?  

I'm primarily looking for an etch rate, even a ballpark starting point would be useful.
 I'm headed back to Salt Lake City on Wednesday, so any help before then would be greatly

Best Regards,

University of Utah
50 S Central Campus Drive
Salt Lake City, UT 84112
MEB Rm 1448
Office: 801-587-9462
Cell: 801-815-9981