Subject: Raith
From: James Conway <>
Date: Tue, 26 Apr 2005 15:25:13 -0700

Greetings RAITH Users:

We will continue to keep the system off line through this week.
If you have reservation on the tool before Thursday 18:00 hours please 
remove them.
We don't anticipate any Users access to the system before that time.

Please see me during my office hour should you have questions.

James Conway

Bernd Stegemann wrote:

>Since the problem with the leakage current is unusual for this column and
>not quite understood, several steps have been taken to troubleshoot the
>The following parts have been exchanged separately, with testing after each
>- Linertube with 6 hole aperture
>- Blanker mechanics
>- Anode including anode aperture
>- extractor contact pin
>Unfortunately every time the column is opened, a long bakeout is needed to
>gain the necessary vacuum.
>The last work on the column was done onm Sunday night; which is the reason
>for the delay. For testing reasons the gun has been run up today. The drop
>in vacuum that occured during the runup indicates that another bakeout cycle
>is required.
>Bernd Stegemann
>Raith GmbH
>I am sorry for the inconvenience and delay.