Subject: FW: Liftoff recipe for maN2403
From: "Arash Hazeghi" <>
Date: Tue, 24 Mar 2009 00:21:38 -0700

Spin MaN 2403 @ 2500 rpm for ~ 4000A thickness, lift off in Remover PG @
60-70C. Time depends on the total opening area you have and it is specific
to your patterns, it can take from 10 minutes to 1 hr.


-----Original Message-----
From: Joong Sun Park [] 
Sent: Tuesday, March 24, 2009 12:19 AM
Subject: Liftoff recipe for maN2403

Hi Raith group,
I'm just wondering whether someone knows the liftoff recipe for  
maN2403 resist.
I will deposit 80nm platinum with innotec.
Thanks in advance.