Subject: Raith is up, with caution
From: Mary Tang <>
Date: Mon, 17 Aug 2009 19:07:14 -0700

Hi all --

Apologies for the delay.  Lev Markov came in and worked on the system 
today, made some repairs and tested the system out. 

He didn't observe any more failures.  But this is apparently 
intermittent and it may occur again.  So, for now, the system is OK to 
use.  But if this error is observed, either contact a Raith champion (if 
one is handy) who should be able to rescue the system in manual mode, or 
call Lev at his direct line, which is posted in the Raith room.

DO NOT run with the loadlock not closed, as this will overheat/burnout 
the turbopump.  Make sure to contact a Raith champion or Lev.

Please make sure to log problems and observations on Coral.



Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305