Subject: RE: RAITH Question/Problem!!
From: "David Fattal" <>
Date: Fri, 12 Sep 2003 16:12:25 -0700

Hi guys,

Raith has been behaving weird this week. The Leo computer reboots itself
from time to time (it happened yesterday=thursday again), and it's been hard
to get a decent focus (on the 100 nm level) the past two days. Also, a new
unloading problem is occuring right now: the load lock arm ('T' degree of
freedom) cannot get the stage back to the load lock.

Can this all be correlated to a more universal problem ? Any suggestion ?