Subject: Re: Ma-N 2403 negative Ebeam resist and YES oven
From: jim kruger <jimkruger@yahoo.com>
Date: Tue, 25 Nov 2008 14:26:30 -0800 (PST)

I believe you can "spoil" the HMDS with a brief O2 plasma and restore Ma-N adhesion.
 Solvents do not remove the HMDS.

jim


--- On Tue, 11/25/08, Arash Hazeghi <ahazeghi@stanford.edu> wrote:

> From: Arash Hazeghi <ahazeghi@stanford.edu>
> Subject: Ma-N 2403 negative Ebeam resist and YES oven
> To: "raith" <raith@snf.stanford.edu>, ebeam@snf.stanford.edu, yes@snf.stanford.edu
> Date: Tuesday, November 25, 2008, 1:36 PM
> Greetings,
> A while back I posted about an issue not being able to spin
> Ma-N 2403 negative ebeam resist on wafers primed in the YES
> oven. Since then, I have only been using the standard 150C
> singe oven prior to Ma-N spin and the results have been
> good. Today I tried spinning MaN on a wafer that had gone in
> the YES oven (the wafer had ZEP on it before and thus primed
> in YES two days ago) and again to my surprise adhesion was
> very poor.
> Although HMDS prime is recommended in the official data
> sheet for Ma-N2403, I have come to the conclusion that
> currently it is not compatible with the recipe used in the
> YES oven, so I thought I'd share this with other users
> who may want to use this resist. This also confirms Jim
> Kruger's findings. 
> 
> 
> Best,
> Arash