Subject: headway does not work...
From: Kyeongran Yoo <>
Date: Sat, 13 Dec 2008 19:55:12 -0800 (PST)


The headway chuck does not move.  When I put a wafer on top of the chuck, it just suck
it without moving.
I tried to almost every single chuck, but it does not help.  I also turned off and turned
on again, but it did not help either.
Please let me know if anyone knows how to fix it.
I have a share a ride session from 8pm today, but I cannot use headway now.  It took
me around 30min, but no luck.