Subject: Re: Final Reminder: Ebeam Town Hall Meeting --- TODAY December 2, 2005. 2 - 4 PM CISX 338 All are invited to attend.
From: James Conway <jwc@snf.stanford.edu>
Date: Fri, 02 Dec 2005 16:08:40 -0800
Fri, 02 Dec 2005 16:08:40 -0800
Hemanth,

Thank you for your attendance and the great feedback.  I have already 
asked Bryan Tracy to submit a portion of his presentation to us for 
review by the users that may have missed his presentation.  Hopefully I 
will receive that content next week.

Thank you for your support!

James Conway


Hemanth Jagannathan wrote:

> HI James,
>  
>     Thanks for arranging the presentation. It was fantastic in its 
> content, SEM images and tips to get better SEM images. Will it be 
> possible to get a copy of Bryan's presentation? I had to run out for 
> another meeting and would like to go over the presentation again.
>  
> Thanks,
>  
> Best-
>  
> Hemanth Jagannathan
> PhD Candidate
> Department of Electrical Engineering
> Stanford University, CA
> Phone :(O)(650)-725-0417; (C) (650)-380-2105
> e-mail: jhemanth@stanford.edu <blocked::mailto:jhemanth@stanford.edu>
>
>  
>
>     -----Original Message-----
>     From: James Conway [mailto:jwc@snf.stanford.edu]
>     Sent: Friday, December 02, 2005 9:16 AM
>     To: ebeam@snf.stanford.edu; Raith SNF Mailing list;
>     beamtools@snf.stanford.edu; semhitachi@snf.stanford.edu;
>     sem4160@snf.stanford.edu
>     Cc: weekly report; pease@jumpjibe.stanford.edu
>     Subject: Final Reminder: Ebeam Town Hall Meeting --- TODAY
>     December 2, 2005. 2 - 4 PM CISX 338 All are invited to attend.
>
>
>         Greetings to the Ebeam and Raith User Communities:
>
>      The Ebeam Lab Town Hall Meeting will be held this afternoon
>     Friday December 2, 2005 at 2 - 4 PM in CIS-X 338.  All interested
>     parties are invited to attend this event which is always open to
>     everyone.
>
>
>     For your enjoyment we will have a presentation "Scanning Electron
>     Microscopy in the IC Industry" by Bryan Tracy, Ph.D..  Bryan is
>     the Manager for the Materials Characterization Lab at Spansion in
>     Sunnyvale, CA.  He presented a very interesting presentation at
>     the Hitachi Nanotechnology Seminar  and I invited him here to SNF
>     to give his presentation here.
>
>     This is a great opportunity to review some really fine Scanning
>     Electron Microscopy work from an industrial perspective, while
>     obtaining tips and tricks towards improving the quality of your
>     SEM Imaging.
>
>     Light Refreshments will be served.
>
>      Thank you for your participation!
>
>     Yours,
>
>     James Conway
>
>
>       Agenda for December's Ebeam Town Hall Meeting
>
>      Friday December 2, 2005 from 2 - 4 PM in CISX 338
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     This forum is intended to allow lab members using the RAITH 150
>     and Hitachi HL-700 Ebeam exposure systems to provide feedback and
>     inputs towards creating a supportive community of users working
>     together to establish best practices and methods pushing the
>     limits of Ebeam Lithography.
>     This is also an opportunity to report your EBL results, problems,
>     and concerns and obtain feedback from the community-at-large.
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     Last year this forum successfully developed new reservation and
>     system usage guidelines that improved system access and
>     utilization for a large user base.  This effort was successful and
>     guided similar equipment policies on other SNF tools.
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     1. Welcome and Introduction - James W. Conway  (5 min.)
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     2. Feature Presentation:
>      "Scanning Electron Microscopy in the IC Industry" by Bryan Tracy,
>     Ph.D..
>      Member of the Technical Staff, Spansion, Sunnyvale, CA.  (40
>     minutes + Q&A)
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     3. Raith System Resolution and performance status report   (5 - 10
>     minutes)
>                 - Current Performance issues and results.
>                 - Holiday shut down plan.
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     4. Raith Reservation and Scheduling Issues:             
>                 (<20 minutes)
>
>                 - Changes or Modification to the current reservation
>     policies in place?
>
>                 - Cancellation Policy - 24 hour notice?
>                 - Should we have penalty or charge for cancellations?
>
>                 - Should we implement a Raith Users System Standby list?
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     5. Query of User needs for Negative Tone Ebeam resist for R&D in
>     2006:   (<20 min.)
>
>                 - Microchem MaN-2403 negative tone resist review. 
>
>                 - User interest in HSQ and Calixarenes for High
>     Resolution Negative Tone resist?
>
>     <!--[if !supportEmptyParas]--><!--[endif]-->
>
>
>
>     <!--[endif]-->
>
>      Your inputs are invited.
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     James W. Conway
>
>     Stanford Nanofabrication Facility
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>
>
>


Hemanth,

Thank you for your attendance and the great feedback.  I have already asked Bryan Tracy to submit a portion of his presentation to us for review by the users that may have missed his presentation.  Hopefully I will receive that content next week.

Thank you for your support!

James Conway


Hemanth Jagannathan wrote:
Message
HI James,
 
    Thanks for arranging the presentation. It was fantastic in its content, SEM images and tips to get better SEM images. Will it be possible to get a copy of Bryan's presentation? I had to run out for another meeting and would like to go over the presentation again.
 
Thanks,
 
Best-
 
Hemanth Jagannathan
PhD Candidate
Department of Electrical Engineering
Stanford University, CA
Phone :(O)(650)-725-0417; (C) (650)-380-2105

e-mail: jhemanth@stanford.edu

 

-----Original Message-----
From: James Conway [mailto:jwc@snf.stanford.edu]
Sent: Friday, December 02, 2005 9:16 AM
To: ebeam@snf.stanford.edu; Raith SNF Mailing list; beamtools@snf.stanford.edu; semhitachi@snf.stanford.edu; sem4160@snf.stanford.edu
Cc: weekly report; pease@jumpjibe.stanford.edu
Subject: Final Reminder: Ebeam Town Hall Meeting --- TODAY December 2, 2005. 2 - 4 PM CISX 338 All are invited to attend.

Greetings to the Ebeam and Raith User Communities:

 The Ebeam Lab Town Hall Meeting will be held this afternoon Friday December 2, 2005 at 2 - 4 PM in CIS-X 338.  All interested parties are invited to attend this event which is always open to everyone.


For your enjoyment we will have a presentation "Scanning Electron Microscopy in the IC Industry" by Bryan Tracy, Ph.D..  Bryan is the Manager for the Materials Characterization Lab at Spansion in Sunnyvale, CA.  He presented a very interesting presentation at the Hitachi Nanotechnology Seminar  and I invited him here to SNF to give his presentation here.

This is a great opportunity to review some really fine Scanning Electron Microscopy work from an industrial perspective, while obtaining tips and tricks towards improving the quality of your SEM Imaging.

Light Refreshments will be served.


 Thank you for your participation!


Yours,

James Conway

Agenda for December's Ebeam Town Hall Meeting

 Friday December 2, 2005 from 2 - 4 PM in CISX 338

<!--[if !supportEmptyParas]--> <!--[endif]-->

This forum is intended to allow lab members using the RAITH 150 and Hitachi HL-700 Ebeam exposure systems to provide feedback and inputs towards creating a supportive community of users working together to establish best practices and methods pushing the limits of Ebeam Lithography.
This is also an opportunity to report your EBL results, problems, and concerns and obtain feedback from the community-at-large.

<!--[if !supportEmptyParas]--> <!--[endif]-->

Last year this forum successfully developed new reservation and system usage guidelines that improved system access and utilization for a large user base.  This effort was successful and guided similar equipment policies on other SNF tools.

<!--[if !supportEmptyParas]--> <!--[endif]-->

1. Welcome and Introduction – James W. Conway  (5 min.)

<!--[if !supportEmptyParas]--> <!--[endif]-->

2. Feature Presentation:
 "Scanning Electron Microscopy in the IC Industry" by Bryan Tracy, Ph.D..
 Member of the Technical Staff, Spansion, Sunnyvale, CA.  (40 minutes + Q&A)

<!--[if !supportEmptyParas]--> <!--[endif]-->

3. Raith System Resolution and performance status report   (5 - 10 minutes)
            - Current Performance issues and results.
            - Holiday shut down plan.

<!--[if !supportEmptyParas]--> <!--[endif]-->

4. Raith Reservation and Scheduling Issues:                          (<20 minutes)

            - Changes or Modification to the current reservation policies in place?

            - Cancellation Policy – 24 hour notice?
            - Should we have penalty or charge for cancellations?

            - Should we implement a Raith Users System Standby list?

<!--[if !supportEmptyParas]--> <!--[endif]-->

5. Query of User needs for Negative Tone Ebeam resist for R&D in 2006:   (<20 min.)

            - Microchem MaN-2403 negative tone resist review. 

            - User interest in HSQ and Calixarenes for High Resolution Negative Tone resist?

<!--[if !supportEmptyParas]--><!--[endif]-->



<!--[endif]-->

 Your inputs are invited.

<!--[if !supportEmptyParas]--> <!--[endif]-->

James W. Conway

Stanford Nanofabrication Facility

<!--[if !supportEmptyParas]--> <!--[endif]-->

<!--[if !supportEmptyParas]--> <!--[endif]-->

<!--[if !supportEmptyParas]--> <!--[endif]-->

<!--[if !supportEmptyParas]--> <!--[endif]-->