Subject: Re: REMINDER: Ebeam Technical Advisory Commitee Kick off Meeting TODAY 3 - 5 PM.
From: "Fabian Pease" <pease@cis.stanford.edu>
Date: Tue, 5 Aug 2003 10:57:49 -0700
Tue, 5 Aug 2003 10:57:49 -0700
James:
THank you for arranging this. I am afraid I was out of town last Friday but I am glad
to see that these will be held each month. That will give us a chance to review in some
detail the technical performance of the Raith and, hopefully also, the Hitachi.
Fabian
  ----- Original Message ----- 
  From: James Conway 
  To: raith@snf.stanford.edu ; Mary Tang ; John Shott ; Yoshio Nishi ; 'Fabian Pease'
; Hongjie Dai -- Professer Chemistry Dept. ; David Goldhaber-Gordon ; quate@stanford.edu
; kmoler@stanford.edu ; BEASLEY@stanford.edu ; JHHARRIS@stanford.edu ; PLUMMER@ee.Stanford.EDU
; osheroff@stanford.edu ; solgaard@ee.Stanford.EDU ; SARASWAT@cis.stanford.edu ; peter@snf.stanford.edu
; okilic@stanford.edu ; kcrozier@stanford.edu ; arvisun@stanford.edu ; rohits@stanford.edu
; wkim@snf.stanford.edu ; amol@stanford.edu ; anojeh@stanford.edu ; DaChen.CHU@stanford.edu
; tbilir@stanford.edu ; fumin@stanford.edu ; ychliu@stanford.edu ; shimbo@snf.stanford.edu
; scaccag@stanford.edu ; ajavey@snf.stanford.edu ; chquay@mtholyoke.edu ; lsmoore@stanford.edu
; mtopinka@stanford.edu ; nayoung@stanford.edu ; bubble@snf.stanford.edu ; Paul Jerabek

  Cc: Nancy Latta ; Mahnaz Mansourpour 
  Sent: Friday, August 01, 2003 10:38 AM
  Subject: REMINDER: Ebeam Technical Advisory Commitee Kick off Meeting TODAY 3 - 5
PM.


  Good Morning, 
  Please be reminded that today we are having a Kickoff Meeting to form the  Ebeam Technology
Group Technical Advisory Committee.  This meeting will be held in CIS 101 from 3 - 5
PM. 

  You are invited to participate in helping me develop this group into an effective
working group with the goals of: 

    a.. Improving communications with Faculty and committed members of the Ebeam Community
here at Stanford University. 
    b.. Provide a monthly forum to communicate progress, develop solutions to challenges,
and aid in making decisions that influence the larger group of Users on our Beam Tools.

    c.. To provide a technical resource and consultancy to the Ebeam Lab members. 
    d.. Form a strategy to  drive an effort to make the SNF Ebeam Lab become a visible
and leading influence in Ebeam Lithography improving technical exchange with researchers
at other universities and within the NUNN network. 
    e.. Provide a forum of peer review and support for measurements, metrology, and
testing methods to evaluate our Ebeam system's performance. 
  This group will meet monthly and I would expect a one year commitment to attend and
participate in these meetings from you. 
  It is hoped that you will be able to attend this and future meetings as your busy
schedules will allow. 

  Thank you, 

  JWC 
    

  Agenda for the Ebeam Technology Advisory Committee Kick Off Meeting. 
  Friday August 1, 2003 3 - 5 PM  CIS 101. 

  3:00 - 3:05 Welcome 
                      Scope of the Committee 
                      What I hope we can achieve in the short term and long term- brief.


  3:05 - 3:15 The Year in Review 
                      Equipment 
                      Processes 
                      People 

  3:15 - 3:45 Current Issues to Address. 
     Hitachi -- Current Status and Plan to return the system to Specifications. 
     Raith -- Resolution of Stage and Gun issues related to the Write Field Stitching
problems experienced. 
               -- Review of measurements and the decision tree to resolve these issues.

               -- Concerns and issues with regards to LEO Field service. 

  3:45 - 4:00   Web Based Communications, Logbooks and Reporting criteria for Users
of the SNF Ebeam Facility. 
                      How to effectively improve reporting and web based dissemination
of information to the Ebeam Community. 
                              - To Swiki or not to Swiki... 
                              - Our Web or Yours... 
                              -Improving communications... 

  4:00 - 4:20 Future Directions of Focus for the Ebeam Technology Group research: 

        Identify the Biggest needs for the Lab. 
         - What must we have to improve the lab in Equipment, Processes, and People?

         - How can we better meet the expectations and needs for the Ebeam Community?


   Novel Resist Systems: 
  Positive Tone Materials | PMMA on membranes | UHR Ebeam Lithography | SPL 
  Negative Tone materials | Calixarenes and HSQ | Direct write polymeric systems. 

  Devices and future areas of interest and importance to Lab Users. 

  4:20 - 5:00 Open Discussions. 

  You are invited to attend any, all, or part, as your time will allow. 

  Thank you, 

  James Conway 
    

  Announcement June 27, 2003: 
  >>NEW Ebeam Technical Advisory Committee Forming in August: 
  > I am interested in forming a technical advisory committee for the Ebeam 
  > Technology Group here at SU.  I would like to identify Faculty, Advanced 
  > Users of Ebeam, and RAITH Champions whom would be interested in forming this 
  > committee. 
  > The kick off meeting will occur Friday August 1, 2003 at 3 PM in CIS 101. 
  > Please reply by email to jwc@snf.stanford.edu, Subject: Ebeam Committee, if 
  > you are interested in participating. 
  > 



James:
THank you for arranging this. I am afraid I was out of town last Friday but I am glad to see that these will be held each month. That will give us a chance to review in some detail the technical performance of the Raith and, hopefully also, the Hitachi.
Fabian
----- Original Message -----
From: James Conway
To: raith@snf.stanford.edu ; Mary Tang ; John Shott ; Yoshio Nishi ; 'Fabian Pease' ; Hongjie Dai -- Professer Chemistry Dept. ; David Goldhaber-Gordon ; quate@stanford.edu ; kmoler@stanford.edu ; BEASLEY@stanford.edu ; JHHARRIS@stanford.edu ; PLUMMER@ee.Stanford.EDU ; osheroff@stanford.edu ; solgaard@ee.Stanford.EDU ; SARASWAT@cis.stanford.edu ; peter@snf.stanford.edu ; okilic@stanford.edu ; kcrozier@stanford.edu ; arvisun@stanford.edu ; rohits@stanford.edu ; wkim@snf.stanford.edu ; amol@stanford.edu ; anojeh@stanford.edu ; DaChen.CHU@stanford.edu ; tbilir@stanford.edu ; fumin@stanford.edu ; ychliu@stanford.edu ; shimbo@snf.stanford.edu ; scaccag@stanford.edu ; ajavey@snf.stanford.edu ; chquay@mtholyoke.edu ; lsmoore@stanford.edu ; mtopinka@stanford.edu ; nayoung@stanford.edu ; bubble@snf.stanford.edu ; Paul Jerabek
Cc: Nancy Latta ; Mahnaz Mansourpour
Sent: Friday, August 01, 2003 10:38 AM
Subject: REMINDER: Ebeam Technical Advisory Commitee Kick off Meeting TODAY 3 - 5 PM.

Good Morning,

Please be reminded that today we are having a Kickoff Meeting to form the  Ebeam Technology Group Technical Advisory Committee.  This meeting will be held in CIS 101 from 3 - 5 PM.

You are invited to participate in helping me develop this group into an effective working group with the goals of:

This group will meet monthly and I would expect a one year commitment to attend and participate in these meetings from you.

It is hoped that you will be able to attend this and future meetings as your busy schedules will allow.

Thank you,

JWC
 

Agenda for the Ebeam Technology Advisory Committee Kick Off Meeting.
Friday August 1, 2003 3 - 5 PM  CIS 101.

3:00 - 3:05 Welcome
                    Scope of the Committee
                    What I hope we can achieve in the short term and long term- brief.

3:05 - 3:15 The Year in Review
                    Equipment
                    Processes
                    People

3:15 - 3:45 Current Issues to Address.
   Hitachi -- Current Status and Plan to return the system to Specifications.
   Raith -- Resolution of Stage and Gun issues related to the Write Field Stitching problems experienced.
             -- Review of measurements and the decision tree to resolve these issues.
             -- Concerns and issues with regards to LEO Field service.

3:45 - 4:00   Web Based Communications, Logbooks and Reporting criteria for Users of the SNF Ebeam Facility.
                    How to effectively improve reporting and web based dissemination of information to the Ebeam Community.
                            - To Swiki or not to Swiki...
                            - Our Web or Yours...
                            -Improving communications...

4:00 - 4:20 Future Directions of Focus for the Ebeam Technology Group research:

      Identify the Biggest needs for the Lab.
       - What must we have to improve the lab in Equipment, Processes, and People?
       - How can we better meet the expectations and needs for the Ebeam Community?

 Novel Resist Systems:
Positive Tone Materials | PMMA on membranes | UHR Ebeam Lithography | SPL
Negative Tone materials | Calixarenes and HSQ | Direct write polymeric systems.

Devices and future areas of interest and importance to Lab Users.

4:20 - 5:00 Open Discussions.

You are invited to attend any, all, or part, as your time will allow.

Thank you,

James Conway
 

Announcement June 27, 2003:
>>NEW Ebeam Technical Advisory Committee Forming in August:
> I am interested in forming a technical advisory committee for the Ebeam
> Technology Group here at SU.  I would like to identify Faculty, Advanced
> Users of Ebeam, and RAITH Champions whom would be interested in forming this
> committee.
> The kick off meeting will occur Friday August 1, 2003 at 3 PM in CIS 101.
> Please reply by email to jwc@snf.stanford.edu, Subject: Ebeam Committee, if
> you are interested in participating.
>