Subject: Urgent Dose Question (Raith)
From: okilic@stanford.edu
Date: Wed, 13 Aug 2003 01:11:24 -0700

Dear Raith users,

Some unexpected results force me to switch from 340nm PMMA (5%,495K) 
to 1000nm. Since I need urgently some results I have no time for a 
dose test.

Therefore could you tell:

- What spin speed usually gives 1000nm thickness.
- What dose (uC), and what acceleration (kV) gives good resolved 
structures for ~1000nm thick PMMA.
- And what developing process you use. (For 1:2 MIBK:IPA that would 
give 2min:30sec for 400nm/min I guess.)

Any help will be appreciated. Please don't hesitate to reply even if 
you don't know ALL of the answers.

Onur