Subject: Raith Status Friday the 13th 9 AM: System coming back up after downtime and repairs. Please read me...
From: James Conway <jwc@snf.stanford.edu>
Date: Fri, 13 Oct 2006 09:09:40 -0700
Fri, 13 Oct 2006 09:09:40 -0700
Greetings Raith Users:

Yesterday I qualified the Raith system and the system is has writing its 
first write.  All interfaces and sub-system modules are now working 
correctly. 
I will develop and inspect the samples written later this morning and 
send out a email report this afternoon.

Everything looks good with system functionality.
Left hand short shot contamination dots down to 14 nm.
Image ripple from vibration / magnetic fields / acoustic influences are 
within the 5 - 7 nm normal range.
Maximum resolution of images at 500 kX is 5.2 nm, just slightly above 
specifications for this system,  but I expect this will improve as we 
increase the Extraction voltage and emission increases as we run in the 
FE-Gun..
Expect 1.5 - 3.5 nm at 10 kV, 1 - 2 nm at 20 kV  - System specs. are 4 
nm @ 10 kV and < 2 nm at 20 kV.

FE-Gun Note:
A brand new FE-Gun was installed with now just 54 hours of run time on 
it.  Emission current values are much lower than the previous FE-Gun. 
This tip will require some time to run itself in before emission will 
return to normal levels.  10 kV / 30 um aperture Beam I = 0.1256 nA 
compared to ~ 0.250 nA previously.  Tuesday next week, I will increase 
Extraction V settings to optimal values for EBL. Currently I have left 
the FE-GUN set to the Factory recommended settings on Zeiss Field 
Service's request.  (4.7 KV)

    RESTRICTIONS ON ACCELERATION VOLTAGES:  
1. USERS ARE NOT TO GO ABOVE 10 KV ACCELERATION VOLTAGE UNTIL FURTHER 
NOTICE. NEXT WEEK WE WILL TEST AT HIGHER ACC .VOLTAGES...

ALL SAMPLES GOING INTO THE SYSTEM MUST BE PRE-BAKED ABOVE 90 DEGREES C 
FOR 2 MINUTES TO DESORB YOUR SAMPLES.

ALL USERS ARE ASKED TO BE VERY CAREFUL TO HELP MAINTAIN CLEANLINESS OF 
THE SYSTEM AND TO CHANGE GLOVES AS  YOU OPEN THE LL CHAMBER AND REACH IN 
TO RETRIEVE THE SAMPLE HOLDER.

RAITH CHAMPIONS ONLY ON THE SYSTEM THROUGH SUN. NOON, UNLESS CLEARED BY 
JAMES CONWAY.
CALL ME IMMEDIATELY IF YOU OBSERVED ANYTHING UNUSUAL OR ENCOUNTER 
PROBLEMS ON THE TOOL.


Many thanks to RAITH USA Field service personnel  and application / 
hardware specialist in Dortmund and Oberkocken, Germany.
Thank you to Zeiss SMT Field Service engineer Mike Santomango for going 
above and beyond expectations to get us back up and running once we 
received the needed boards to repair the SEM sections on the system.

Post Mortem Report due out next week.

Thank you for your support during this difficult period,

James Conway
Ebeam Lab - SNF



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Greetings Raith Users:

Yesterday I qualified the Raith system and the system is has writing its first write.  All interfaces and sub-system modules are now working correctly. 
I will develop and inspect the samples written later this morning and send out a email report this afternoon.

Everything looks good with system functionality.
Left hand short shot contamination dots down to 14 nm.
Image ripple from vibration / magnetic fields / acoustic influences are within the 5 - 7 nm normal range.
Maximum resolution of images at 500 kX is 5.2 nm, just slightly above specifications for this system,  but I expect this will improve as we increase the Extraction voltage and emission increases as we run in the FE-Gun..
Expect 1.5 - 3.5 nm at 10 kV, 1 - 2 nm at 20 kV  - System specs. are 4 nm @ 10 kV and < 2 nm at 20 kV.

FE-Gun Note:
A brand new FE-Gun was installed with now just 54 hours of run time on it.  Emission current values are much lower than the previous FE-Gun. This tip will require some time to run itself in before emission will return to normal levels.  10 kV / 30 um aperture Beam I = 0.1256 nA compared to ~ 0.250 nA previously.  Tuesday next week, I will increase Extraction V settings to optimal values for EBL. Currently I have left the FE-GUN set to the Factory recommended settings on Zeiss Field Service's request.  (4.7 KV)

    RESTRICTIONS ON ACCELERATION VOLTAGES:  
1. USERS ARE NOT TO GO ABOVE 10 KV ACCELERATION VOLTAGE UNTIL FURTHER NOTICE. NEXT WEEK WE WILL TEST AT HIGHER ACC .VOLTAGES...

ALL SAMPLES GOING INTO THE SYSTEM MUST BE PRE-BAKED ABOVE 90 DEGREES C FOR 2 MINUTES TO DESORB YOUR SAMPLES.

ALL USERS ARE ASKED TO BE VERY CAREFUL TO HELP MAINTAIN CLEANLINESS OF THE SYSTEM AND TO CHANGE GLOVES AS  YOU OPEN THE LL CHAMBER AND REACH IN TO RETRIEVE THE SAMPLE HOLDER.

RAITH CHAMPIONS ONLY ON THE SYSTEM THROUGH SUN. NOON, UNLESS CLEARED BY JAMES CONWAY.
CALL ME IMMEDIATELY IF YOU OBSERVED ANYTHING UNUSUAL OR ENCOUNTER PROBLEMS ON THE TOOL.


Many thanks to RAITH USA Field service personnel  and application / hardware specialist in Dortmund and Oberkocken, Germany.
Thank you to Zeiss SMT Field Service engineer Mike Santomango for going above and beyond expectations to get us back up and running once we received the needed boards to repair the SEM sections on the system.

Post Mortem Report due out next week.

Thank you for your support during this difficult period,

James Conway
Ebeam Lab - SNF


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