Subject: [Fwd: Re: RAITH STATUS FRIDAY 2 PM -- SYSTEM OPERATION NORMAL NO CURRENT PROBLEMS OUTSTANDING]
From: James Conway <jwc@snf.stanford.edu>
Date: Mon, 23 Oct 2006 11:21:59 -0700

Users are requested to report their reference clearing dose and any results they obtained coming on the system since it came back up last week.

Best,

James

-------- Original Message --------
Subject: Re: RAITH STATUS FRIDAY 2 PM -- SYSTEM OPERATION NORMAL NO CURRENT PROBLEMS OUTSTANDING
Date: Mon, 23 Oct 2006 11:20:44 -0700
From: James Conway <jwc@snf.stanford.edu>
Organization: Stanford Nanofabrication Facility - Stanford University
To: Andrei Faraon <faraon@stanford.edu>
References: <453949A9.3080603@snf.stanford.edu> <28d3ece90610201509h2f6dffe5i3250ec1049a4c5e3@mail.gmail.com> <45394E0D.2030107@snf.stanford.edu> <28d3ece90610201526r76160756j6f328dfc6c55e65b@mail.gmail.com>


Hello All Three Anonymous People and Andrei,

As I said before this is very strange. So lets open the thread to the 
RAITH Users as well...

I tested the system last week with 100 nm reference PMMA and my doses to 
clear were the normal at 100 down from 105 to 110 uC/cm**2.
This was exposed at 10 keV and 30 um aperture at 5 mm.  Beam I was low 
on the order of 0.120 nA.  (We can check the log book.)
All the patterns and SPL's Looked fine.

Give me a file or two to test with my next test.

Which process(es) are you using in your exposures.

James

Andrei Faraon wrote:
> All the people from my group who processed recently (three people) got 
> the same results.
>
> Andrei
>
>
> On 10/20/06, *James Conway* < jwc@snf.stanford.edu 
> <mailto:jwc@snf.stanford.edu>> wrote:
>
>     Your dose should not have changed as the system will adjust the
>     dwell time to meet the dose request.
>     Be sure you are measuring the beam I correctly by either zooming
>     into the center of the Faraday cup image or placing the system
>     into spot mode.
>     All the doses in my test were spot on...
>
>     Could the thickness of resist for your sample have changed?
>     (Increased?)
>
>
>     More next week,
>
>     JWC
>
>
>
>     Andrei Faraon wrote:
>>     Hi James,
>>
>>     I wanted to inform you that we have to use much higher dose than
>>     what we used before. We wrote the patterns with the same dose
>>     that we used before Raith was down and they are not cleared. The
>>     dose for clear went from about 120pA to 140pA.
>>
>>     Andrei
>>
>>
>>
>>     On 10/20/06, *James Conway* <jwc@snf.stanford.edu
>>     <mailto:jwc@snf.stanford.edu>> wrote:
>>
>>         GREETINGS:
>>
>>         Since the system return to service yesterday all system and
>>         module are normal and functional.
>>         Users should see little difference than from before.
>>         Resolution is good and the FE-Gun emission is slowly climbing.
>>         ALL USERS ARE RESTRICTED TO LESS THAN OR EQUAL TO 10 keV
>>         ACCELERATION VOLTAGE.
>>
>>         I will perform adjustments and calibration of the piezo post
>>         and Electrostatic chuck at some time next week. 
>>
>>         Thank you for your support,
>>
>>         James Conway
>>
>>
>>
>>
>>     -- 
>>     Andrei Faraon
>>
>>     Stanford University, Applied Physics
>>     316 Via Pueblo Mall
>>     Stanford, CA, 94305
>>     Mobile: 650 714 7881
>>     Office: 650 723 2279 
>
>
>
>
> -- 
> Andrei Faraon
>
> Stanford University, Applied Physics
> 316 Via Pueblo Mall
> Stanford, CA, 94305
> Mobile: 650 714 7881
> Office: 650 723 2279