Subject: RAITH STATUS 2006-10-27 13:18:48: User can now operate system to not to exceed 20 kV
From: James Conway <jwc@snf.stanford.edu>
Date: Fri, 27 Oct 2006 13:57:19 -0700

Greetings Raith Community:

Good for Users to go up to, but not above, 20 keV acceleration voltages for your Ebeam writes.

Nice tight beam and great resolution.  Left hand contamination dots when properly stigmated are less than 15 nm.



-------- Original Message --------
Subject: Comment raith SNF 2006-10-27 13:18:48: User can now operate system to not to exceed 20 kV
Date: Fri, 27 Oct 2006 13:18:50 -0700
From: jwc@snf.stanford.edu
To: raith-pcs@snf.stanford.edu


Greetings:
Good Gun vacuum has been est. at <5.5E-010 mBar - 4.5E-010 Torr for nearly a week.
Yesterday I ran at 20 kV for six hours without significant increases in Gun pressure. NO EHT trips or other problems.
Users are now able to run the acceleration voltage up to but not to exceed 20keV.
Further testing at high acc. voltage next week.
Thank you for your support!
James Conway